Deposition of carbon nanotubes by capillary-type atmospheric pressure PECVD

Kyung, Se-Jin; Lee, Yonghyuk; Kim, Chanwoo; Lee, Junhee; Yeom, Geun‐Young

doi:10.1016/j.tsf.2005.08.325

Cited by 19 publications

(17 citation statements)

References 19 publications

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“…Kyung and co-workers [93,94] achieved deposition of carbon nanotube arrays, employing the upper electrode with a more complicated design (Fig. 1b).…”

Section: Application Of the Dielectric Barrier Discharge In The Plasmmentioning

confidence: 99%

Plasmachemical synthesis in low-temperature atmospheric pressure plasma

2015

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“…Kyung and co-workers [93,94] achieved deposition of carbon nanotube arrays, employing the upper electrode with a more complicated design (Fig. 1b).…”

Section: Application Of the Dielectric Barrier Discharge In The Plasmmentioning

confidence: 99%

Plasmachemical synthesis in low-temperature atmospheric pressure plasma

2015

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“…With regards to the dielectric barrier discharges (DBDs), Kyung, Lee et al investigated filamentary DBD discharges at kHz frequen cies for the deposition of supported CNTs. Their investigations were carried out using a multipin electrode covered by a dielectric plate [28] and capillary dielectric barrier [29][30][31] configurations. The most successful application of DBD, in this case its glow mode (atmospheric-pressure glow), was performed by Nozaki et al It has been shown that vertically aligned SWNTs grow in RF atmospheric-pressure glow (APG) discharge using He/H 2 /CH 4 feed [32].…”

Section: Chemical Vapor Deposition Of Carbon Nanotubesmentioning

confidence: 99%

Synthesis of carbon nanotubes by plasma-enhanced chemical vapor deposition in an atmospheric-pressure microwave torch

Zajı́čková

Jašek

Eliáš

et al. 2010

Pure and Applied Chemistry

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Abstract:There are many different techniques for the synthesis of carbon nanotubes (CNTs), and plasma technologies experience a significant competitor in thermal chemical vapor deposition (CVD) processes. A particular process is, therefore, selected according to the specific requirements of an application, which clearly differ for the development of composites as compared to nanoelectronics, field emission, displays, sensors, and the like. This paper discusses the method for the synthesis of CNTs using an atmospheric-pressure microwave (MW) torch. It was successfully applied in the fast deposition of multiwalled nanotubes (MWNTs) on a substrate without the necessity of any vacuum or heating equipment. Dense straight-standing nanotubes were prepared on Si substrates with and also without barrier SiO x layer. Therefore, it was possible to produce CNTs directly on conductive Si and to use them as an electron-emitting electrode of the gas pressure sensor. The CNTs grown in MW torch were also used to create a gas sensor based on the changes of electrical resistance measured between two planar electrodes connected by the CNTs.

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“…One is to grow the CNTs directly onto patterned catalyst layers at low pressure by chemical vapor deposition 6,7 ͑CVD͒, and the other is to screen print the CNTs mixed with organic vehicles. [8][9][10] There are problems associated with the direct growth of CNTs on a glass substrate for FED.…”

Section: Introductionmentioning

confidence: 99%

The effect of Ar neutral beam treatment of screen-printed carbon nanotubes for enhanced field emission

Kyung

Park

et al. 2007

Journal of Applied Physics

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This study examined the effectiveness of an Ar neutral beam as a surface treatment for improving the field emission properties of screen-printed carbon nanotubes (CNTs). A short period of the neutral beam treatment on tape-activated CNTs enhanced the emission properties of the CNTs, showing a decrease in the turn-on field and an increase in the number of emission sites. The neutral beam treatment appeared to render the CNT surfaces more actively by exposing more CNTs from the CNT paste without cutting or kinking the already exposed long CNT emitters. The treated CNTs emitted more electrons than the CNTs treated using other methods. When the field emission properties were measured after the neutral beam treatment, the turn-on field decreased from 1.65to0.60V∕μm and the emission field at 1mA∕cm2 decreased from 3.10to2.41V∕μm. After the neutral beam treatment for 10s, there was an improvement in the stability of the emission current at a constant electric field. It is expected that the neutral beam treatment introduced in this study will provide an easy way of improving the emission intensity and stability of screen-printed CNT emitters.

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Deposition of carbon nanotubes by capillary-type atmospheric pressure PECVD

Cited by 19 publications

References 19 publications

Plasmachemical synthesis in low-temperature atmospheric pressure plasma

Plasmachemical synthesis in low-temperature atmospheric pressure plasma

Synthesis of carbon nanotubes by plasma-enhanced chemical vapor deposition in an atmospheric-pressure microwave torch

The effect of Ar neutral beam treatment of screen-printed carbon nanotubes for enhanced field emission

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