Deposition of carbon films by direct ion beam

Abstract

In this study diamond-like carbon (DLC) films have been grown onto the Si(111) and steel substrates by direct hydrocarbon (hexane, acetylene) ion beam deposition. Raman spectra of the room temperature deposited carbon films were typical of the hard tetrahedral amorphous carbon films. At 500 and 750 K temperatures, polymer-like carbon films have been synthesized. Hydrocarbon gas dilution by nitrogen resulted in growth of the more graphitic films. Increase of the deposition temperature resulted in increased internal stress in carbon films deposited from hexane-hydrogen gas mixture. Thin film stress decreased as a result of the hexane-hydrogen mixture dilution by nitrogen. Stress decreased with increase of the nitrogen concentration. It has been revealed that DLC films can be deposited by direct ion beam onto the AISI 316 steel at room temperature. Ion beam nitridation was the best method for increase of adhesion between the DLC and steel substrate.