Deposition of amorphous Fe–Zr alloys by magnetron co-sputtering

Iljinas, Aleksandras; Milčius, D.; Dudonis, J.

doi:10.1016/j.vacuum.2007.01.067

Cited by 15 publications

(10 citation statements)

References 19 publications

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“…The Fe-Zr system is known to have a good amorphous alloy in the Fe rich side of the Fe-Zr phase diagram with a composition of Fe 90 Zr 10 [21]. This alloy has been observed by Osamura [22] not to form crystalline phases in Fe-Zr system such as FeZr 3 , Fe 2 Zr and FeZr 2 after thermal annealing.…”

Section: Introductionmentioning

confidence: 94%

Cobalt silicide formation on a Si(1 0 0) substrate in the presence of an interfacial (Fe 90 Zr 10 ) interlayer

Abrass

Theron

Njoroge

et al. 2015

Nuclear Instruments and Methods in Physics Research Section B:

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Section: Introductionmentioning

confidence: 94%

Cobalt silicide formation on a Si(1 0 0) substrate in the presence of an interfacial (Fe 90 Zr 10 ) interlayer

Abrass

Theron

Njoroge

et al. 2015

Nuclear Instruments and Methods in Physics Research Section B:

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“…The film composition is adjusted for the conventional magnetron sputtering process by sputtering either different alloy targets with certain composition or Co target attached various Nb and Zr chips on it [10]. In this work, CoNbZr films were deposited by co-sputtering Co, Nb and Zr targets simultaneously.…”

Section: Calculation Of Deposition Rate Of Single Targetmentioning

confidence: 99%

Composition design and properties of CoNbZr amorphous films deposited by unbalanced magnetron sputtering

Guang-wei

Tang

Wang

et al. 2009

J. Cent. South Univ. Technol.

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amorphous films were deposited on noncrystalline glass substrates by DC unbalanced magnetron sputtering. The compositions of amorphous films were tailored in the light of the individual deposition rate of Co, Nb and Zr. The amorphous films with the anticipated composition were prepared by means of co-sputtering Co, Nb and Zr targets simultaneously. It is indicated that there is interaction among three targets during co-sputtering. The morphology and composition of the films were observed by SEM, AFM and EDS. The structure and magnetic property were measured by XRD and physical property measurement system (PPMS). The coercivity changes with the composition, varying from 240 to 1 600 A/m. After vacuum isothermal annealing at temperatures of 475, 500, 525 and 550 ℃ for 15 and 30 min, respectively, it is found that high Nb content is beneficial to improving thermal stability of amorphous films. The crystallized films have the mean grain size of 2−19 nm.

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“…in the form of bars with a minimum diameter of 1 mm [3][4][5]. The amorphous alloys can also be obtained by other techniques such as: the grinding [6], the rolling [7], the thin film deposition [8], or the electrochemical deposition [9]. Our study is therefore committed to investigate the thermal properties and the structural characteristics of the two molten alloys for Fe-based metallic glasses whose purpose the possibility to obtain industrial a ribbon and bulk metallic glass form by using the raw materials.…”

Section: Introductionmentioning

confidence: 99%

Preparation and Characterization of Master Alloys Fe48Cr15Mo14C15B6Y2 Metallic Glasses

Bendjemil¹,

Seghairi²,

Lavorato³

et al. 2014

cme

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The purpose of this work is the characterization of a master alloy of metal glass based on iron Fe 48 Cr 15 Mo 14 C 15 B 6 Y 2 . Two types of alloys studied B1 which has been prepared by the use of pure element and the other B2 which has been prepared by the use of raw materials. The thermal and structural properties of the samples are measured by a combination of high temperature differential scanning calorimeter (HTDSC), X-ray diffraction and scanning electron microscopy (SEM). Chemical compositions are checked by energy dispersive spectroscopy analysis.

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Deposition of amorphous Fe–Zr alloys by magnetron co-sputtering

Cited by 15 publications

References 19 publications

Cobalt silicide formation on a Si(1 0 0) substrate in the presence of an interfacial (Fe 90 Zr 10 ) interlayer

Cobalt silicide formation on a Si(1 0 0) substrate in the presence of an interfacial (Fe 90 Zr 10 ) interlayer

Composition design and properties of CoNbZr amorphous films deposited by unbalanced magnetron sputtering

Preparation and Characterization of Master Alloys Fe<sub>48</sub>Cr<sub>15</sub>Mo<sub>14</sub>C<sub>15</sub>B<sub>6</sub>Y<sub>2</sub> Metallic Glasses

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