Deposition of a titanium carbonitride coating by magnetron sputtering on a substrate with a potential voltage

Abstract

Titanium carbonitride (TiCN) is of high relevance in the field of creating wear-resistant protective coatings in order to ensure maximum wear resistance and service life of parts of friction units. Titanium carbonitride coatings were obtained by magnetron sputtering at various bias substrate in the range from 0 to -130 V with a step of 10 V. The effect of the bias substrate on the deposition rate, phase and elemental composition, and the friction coefficient of the obtained coatings was investigated. As a result of the obtained dependences, the most optimal mode of deposition by the method of reactive magnetron sputtering with a negative bias voltage on the substrate was determined.

Development and Implementation of Innovative Technologies That Ensure an Increase in The Extraction of Non-ferrous, Noble, Rare, Rare-Earth Metals

“…Alumina production in the Republic of Kazakhstan with the help of Bayer-sintering technology becomes less profitable and competitive and requires serious modernization. The developed Bayer-hydro-garnet technology enables to solve the problem of high-iron low-quality bauxite processing with minimization of alkali and alumina losses, reduction of electricity consumption and material costs [34,35,36]. The technological scheme of the Bayer-Hydrogranate technology is shown in Figure 7.…”