Deposition and characterization of titanium aluminum nitride coatings prepared by RF magnetron sputtering

Djafer, Amina Zouina Ait; Saoula, Nadia; Aknouche, Hamid; Guedouar, Bendiba; Madaoui, N.

doi:10.1016/j.apsusc.2015.02.053

Cited by 40 publications

(15 citation statements)

References 24 publications

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“…It is very well known that negative bias voltage between -100 and -200 V applied to high-speed-steel substrates during coating deposition by dc or rf magnetron sputtering of titanium nitride and other metal nitride increases noticeabely the hardness of the coatings [18][19][20]. This hardness increasing is generally associated to changes of texture respect to no-biased substrates and the creation of high density of deffects.…”

Section: Discussionmentioning

confidence: 99%

Hardness Enhancement and Corrosion Current of Multilayer Coatings Based on Titanium Nitride

Talledo¹,

Asencios²,

Paucar³

et al. 2015

JMSE-A

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Abstract:In this article we explore the possibilities to obtain hardness enhancement in three different types of multilayer system: TiN/AlN, TiN/NbN and TiN/TaN, produced by bias-dc magnetron sputtering under the same deposition conditions. Multilayer structure and chemical composition were confirmed by GDOES (Glow discharge optical emission spectroscopy). Crystalline structure of component layers was studied by XRD (X-ray diffraction). Microhardness was measured by using a classic Vickers microdurometer and SEM (Scanning electron microscopy), as well as, by nanoindentation. Corrosion current was determined by Tafel extrapolation method.

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Section: Discussionmentioning

confidence: 99%

Hardness Enhancement and Corrosion Current of Multilayer Coatings Based on Titanium Nitride

Talledo¹,

Asencios²,

Paucar³

et al. 2015

JMSE-A

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“…In the cutting tool industry, TiAlN films improve overall performance by forming Al2O3 / TiO2 oxide tartar and contacting hot air. In addition, the AlN components formed using Al to TiN improved the lateral stiffness [26]. They are usually separated by the activated ones.…”

Section: Introductionmentioning

confidence: 99%

“…Titan is successful in withstanding attacks from dilute sulfuric and hydrochloric acids, chloride solutions and most natural acids. Titanium is one of the few factors that burn in pure nitrogen gas and reacts at 800 ° C (1,470 ° F) to form titanium nitride, which leads to embrittlement [3][4][5][6][7][8][9][10][11][12]. Ar (30 sccm) and N2 (15 sccm) were injected into the living room with continuous gas.…”

Section: Introductionmentioning

confidence: 99%

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Investigation of Mechanical and Tribological Properties of Titanium Nitride Deposited on Low Carbon Steel by Rf Magnetron Sputtering

2020

jcr

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Titanium nitride is a promising substance due to its low resistance, excessive hardness, and chemical inactivity on low carbon metal substrates due to the shimmering of the magnetron RF. Its smart productivity and low value. The purpose of this study is to study the effect of thin-film precipitation coefficients on structure, surface morphology, hardness, and wear in an aggressive circumference of 3.5% by weight of sodium chloride from TiN coating. The coating is deposited using reactive RF magnetron sputtering (13.56 MHz). They took place for 60 minutes. The structural evaluation confirmed that the TiN coating crystallized in cubic (fcc) and hexagonal (hcp) structures oriented in planes (100), (111), (200), (220) and (311). The deposited coatings existing most hardness (H=20.21GPa) and Young's modulus (E=200.79GPa Also, mechanical residences (H & E) is strongly influenced by the grain size and density tables. Comparisons revealed that electro chemical as low carbon substrate protected by the TiN coating had excellent corrosion resistance. The stoichiometric TiN film is obtained by circulating a specific polarization and a specific ionized gas in the flow (Ar) and using the optimization of the gasoline to react to the flow (N2). The XRD evaluation was used to manipulate the composition of the film. From the data obtained, the network parameters are it is calculated for each deposition and the stoichiometric film is determined. XPS evaluations of the stoichiometric film indicated that nitrogen and carbon were most often present on the surface.

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“…In addition, TiAlN coatings should grant very good wear and oxidation resistance [15,16,17,18]. Several methods have been proposed for the deposition of TiAlN coatings on many different substrates, like steel, silicon, glass and alumina [15,16,19,20,21,22]. Only a few investigations have concerned the deposition of TiAlN on titanium aluminides by arc ion plating [23] or by magnetron sputtering [24].…”

Section: Introductionmentioning

confidence: 99%

Thermal Shock and Oxidation Behavior of HiPIMS TiAlN Coatings Grown on Ti-48Al-2Cr-2Nb Intermetallic Alloy

et al. 2016

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A High Power Impulse Magnetron Sputtering (HiPIMS) method for depositing TiAlN environmental barrier coatings on the surface of Ti-48Al-2Cr-2Nb alloy was developed in view of their exploitation in turbine engines. Three differently engineered TiAlN films were processed and their performance compared. Bare intermetallic alloy coupons and coated specimens were submitted to thermal cycling under oxidizing atmosphere up to 850 °C or 950 °C, at high heating and cooling rates. For this purpose, a burner rig able to simulate the operating conditions of the different stages of turbine engines was used. Microstructures of the samples were compared before and after each test using several techniques (microscopy, XRD, and XPS). Coating-intermetallic substrate adhesion and tribological properties were investigated too. All the TiAlN films provided a remarkable increase in oxidation resistance. Good adhesion properties were observed even after repeated thermal shocks. HiPIMS pretreatments of the substrate surfaces performed before the coating deposition significantly affected the oxidation rate, the oxide layer composition and the coating/substrate adhesion.

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Deposition and characterization of titanium aluminum nitride coatings prepared by RF magnetron sputtering

Cited by 40 publications

References 24 publications

Hardness Enhancement and Corrosion Current of Multilayer Coatings Based on Titanium Nitride

Hardness Enhancement and Corrosion Current of Multilayer Coatings Based on Titanium Nitride

Investigation of Mechanical and Tribological Properties of Titanium Nitride Deposited on Low Carbon Steel by Rf Magnetron Sputtering

Thermal Shock and Oxidation Behavior of HiPIMS TiAlN Coatings Grown on Ti-48Al-2Cr-2Nb Intermetallic Alloy

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