Dependence of the optical properties of rhodium films on the film thickness

Ellipsometric study of a-Be3N2 thin films prepared by radio frequency magnetron sputtering

“…In general, the optical constants of films are assumed to be constant regardless of film thickness in any conventional optical design. However this assumption is not valid when the film thickness in the optical design becomes very small (ultra-thin film) and it is still applicable for bulk materials [13][14][15][16][17][18][19]. Hence, the variations could be explained by the Bruggman's effective medium theory [13,14], correlates with the film growth and the structure variation [19].…”