Dependence of the electrical and optical behaviour of ITO–silver–ITO multilayers on the silver properties

Klöppel, A.; Kriegseis, W.; Meyer, B.; Scharmann, A.; Daube, Conner; Stollenwerk, Jochen; Trube, J.

doi:10.1016/s0040-6090(99)00949-9

Cited by 166 publications

(73 citation statements)

References 16 publications

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“…In recent years, M. Bender and A. Kloppel et al reported several advantages of magnetron-sputtered ITO/metal/ITO (IMI) structures that use interlayer Ag 7) and AgCu 8) to improve the structural and optoelectrical properties of ITO films. In this study, a sandwich structure of ITO/Au/ITO films was deposited on glass substrates by radiofrequency (RF) sputtering of ITO and direct current (DC) sputtering of Au intermediate film.…”

Section: -6)mentioning

confidence: 99%

Effect of Annealing Temperature on the Properties of ITO/Au/ITO Films

Chae¹,

Kim²

2009

Korean. J. Mater. Res.

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(ITO) single-layer and ITO/Au/ITO multilayer films were deposited on glass substrates by reactive magnetron sputtering to compare the properties of the films. They were then annealed in a vacuum of 1 × 10 -2Pa at temperatures ranging from 150 to 450 o C for 20 min to determine the effect of the annealing temperature on the properties of the films. As-deposited 100 nm thick ITO films exhibit a sheet resistance of 130 Ω/□ and optical transmittance of 77% at a wavelength length of 550 nm. By inserting a 5 nm-thick Au layer in ITO/metal/ITO (IMI) films, the sheet resistance was decreased to as low as 20 Ω/□ and the optical transmittance was decreased to as little as 73% at 550 nm. Post-deposition annealing of ITO/Au/ITO films led to considerably lower electrical resistivity and higher optical transparency. In the Xray diffraction pattern, as-deposited ITO films did not show any diffraction peak, whereas as-deposited ITO/ Au/ITO films have Au (222)

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Section: -6)mentioning

confidence: 99%

Effect of Annealing Temperature on the Properties of ITO/Au/ITO Films

Chae¹,

Kim²

2009

Korean. J. Mater. Res.

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“…It is mainly and probably because the inter-diffusion of atoms becomes severer. 20) Silver atoms diffuse into ITO layers or oxygen atoms diffuse through ITO and react with intermediate layers, causing the oxidation of the metal layers, so the conductivity of both the metal layer and the IMI films decline.…”

Section: Heat Treatment In Air Atmospherementioning

confidence: 99%

Ag–Ti Alloy Used in ITO–Metal–ITO Transparency Conductive Thin Film with Good Durability against Moisture

et al. 2005

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This study investigates the characteristics of IMI (ITO-Metal-ITO) transparent conductive thin films, with an Ag-Ti alloy intermediate layer. Multi-layers were deposited by sputtering. ITO-AgTi-ITO films have better transmittance than ITO-Ag-ITO films in the visible wavelength range. The maximum transparency is 94% after being annealed at 573 K in a vacuum. Although the resistivity of ITO-AgTi-ITO films is slightly higher than that of ITO-Ag-ITO films, the former apparently exhibit greater thermal stability and durability. After exposure to the environment at 323 K with a relative humidity of 90% for 144 h, corrosive spots appear on ITO-Ag-ITO films but not on ITO-AgTi-ITO films.

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“…Because the transparent conductive properties of TMT depended mainly on the metal layer [1,9,[14][15][16], a variety of researches on TMT focused on the metal layer [2,[17][18][19][20][21][22]. Generally, the thickness of metal layer was about 8-14 nm [1] because the too thick metal layer made the light transmittance decrease while the too thin one did not form a continuous layer and made the electrical conductivity decrease dramatically.…”

Section: Introductionmentioning

confidence: 99%

Spreadability of Ag Layer on Oxides and High Performance of AZO/Ag/AZO Sandwiched Transparent Conductive Film

Niu

Liu

et al. 2017

Journal of Nanoscience

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Single layers of indium tin oxide (ITO), aluminum-doped zinc oxide (AZO), and Ag, bilayers of ITO/Ag and AZO/Ag, and sandwiched layers of ITO/Ag/ITO (IAI) and AZO/Ag/AZO (ZAZ) were fabricated on ordinary glass substrates using magnetron sputtering. The surface morphologies of single layers and bilayers were measured. The sheet resistance and transmittance of the sandwiched layers were investigated. The results showed that the spreadability of the Ag on the AZO was significantly better than that on the ITO or bare glass substrate. The spreadability of Ag on underlayers influences obviously the performance of transparent conductive oxide/Ag/transparent conductive oxides (TCO/Ag/TCO or TAT). The sheet resistance and transmittance of the ZAZ sandwiched layer with the matching of 35 nm AZO (35 nm)/Ag (9 nm)/AZO (35 nm) fabricated in this paper were low to 3.84 Ω/sq and up to 85.55% at 550 nm, respectively. Its maximum Haacke figure of merit was 0.05469 Ω −1 , higher than that of IAI multilayer.

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Dependence of the electrical and optical behaviour of ITO–silver–ITO multilayers on the silver properties

Cited by 166 publications

References 16 publications

Effect of Annealing Temperature on the Properties of ITO/Au/ITO Films

Effect of Annealing Temperature on the Properties of ITO/Au/ITO Films

Ag–Ti Alloy Used in ITO–Metal–ITO Transparency Conductive Thin Film with Good Durability against Moisture

Spreadability of Ag Layer on Oxides and High Performance of AZO/Ag/AZO Sandwiched Transparent Conductive Film

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Dependence of the electrical and optical behaviour of ITO–silver–ITO multilayers on the silver properties

Cited by 166 publications

References 16 publications

Effect of Annealing Temperature on the Properties of ITO/Au/ITO Films

Effect of Annealing Temperature on the Properties of ITO/Au/ITO Films

Ag&ndash;Ti Alloy Used in ITO&ndash;Metal&ndash;ITO Transparency Conductive Thin Film with Good Durability against Moisture

Spreadability of Ag Layer on Oxides and High Performance of AZO/Ag/AZO Sandwiched Transparent Conductive Film

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Ag–Ti Alloy Used in ITO–Metal–ITO Transparency Conductive Thin Film with Good Durability against Moisture