The formation behavior of EuSi 2 O 2 N 2 prepared with various starting compositions and different methods from the Eu 2 O 3 -SiO 2 -Si 3 N 4 -Si system was investigated to demonstrate the effect of the oxygen content in raw materials on the synthesis of MSi 2 O 2 N 2 :Eu 2+ ͑M = Ca, Sr, Ba͒ phosphors for white light-emitting diodes. It was found that Eu 2 O 3 cannot be reduced by H 2 gas but can be reduced by a reaction with Si 3 N 4 in the synthesis process of EuSi 2 O 2 N 2 ; as a result, EuSi 2 O 2 N 2 was not obtained from the starting composition containing the excess oxygen content such as 1/2Eu 2 O 3 − 1/2SiO 2 − 1/2Si 3 N 4 even in H 2 gas flow because the extra oxygen causes the formation of secondary phases. A nearly single-phase EuSi 2 O 2 N 2 was obtained from the starting composition having a stoichiometric oxygen amount. The present study indicates that the extra oxygen induced by the use of Eu 2 O 3 should be controlled to synthesize MSi 2 O 2 N 2 :Eu 2+ phosphors as a single phase when Eu 2 O 3 is used as the Eu source material.White light-emitting diodes ͑LEDs͒ have recently been widespread as a solid-state lighting source for general illumination instead of mercury-containing fluorescent lamps owing to their low energy consumption, long lifetime, small size, and a mercury-free structure. 1,2 For practical applications as general illumination, white LEDs, having a high color-rendering index as well as a high luminous efficiency, have to be realized. General white LEDs are fabricated by the combination of phosphors with blue LEDs or UV LEDs. In either case, the development of suitable phosphors is essential.MSi 2 O 2 N 2 :Eu 2+ ͑M = Ca, Sr, Ba͒ oxynitride compounds have attracted attention as promising phosphors for white LEDs due to their excellent luminescence properties and chemical stability. [3][4][5] The emission color of the MSi 2 O 2 N 2 :Eu 2+ phosphor can be tuned by the incorporation of different M 2+ cations into the M 2+ ion site and by changing the concentrations of Eu 2+ , which can make it possible to produce high color-rendering white LEDs. [6][7][8] These phosphors are expected to have a small concentration quenching of the Eu 2+ emission due to their layered crystal structure in which the probability of energy migration between twodimensionally arranged Eu 2+ ions can be suppressed to a low level. 6,[9][10][11] However, with increasing concentrations of Eu 2+ , secondary phases are easily formed and the single phase of MSi 2 O 2 N 2 :Eu 2+ phosphors become hard to be formed. [6][7][8]12,13 For the SrSi 2 O 2 N 2 :Eu 2+ phosphor, Bachmann et al. 8 and Song et al. 12 concluded that the concentration quenching of Eu 2+ emission occurs at around 2 mol % from the observation of the luminescence decay times and quantum efficiency with varying concentrations of Eu 2+ . In addition, Wang et al. 13 reported that the critical quenching concentration of Eu 2+ in CaSi 2 O 2 N 2 :Eu 2+ phosphor is 8 mol %. However, they did not check the influence of the phase purity and crystallinity of ...