Dependence of of thickness F-doped SnO&lt;inf&gt;2&lt;/inf&gt; films grown by spray pyrolysis technique

Oshima, Minoru; Takemoto, Yujin; Yoshino, Kenji

doi:10.1109/pvsc.2009.5411615

Cited by 1 publication

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“…In our previous work, [8][9][10] FTO films were successfully grown on glass substrates by the spray pyrolysis method at 500 C. The (200) orientation became strong with increasing fluorine concentration. In addition, F-doping caused the resistivity to decrease and the carrier concentration to increase.…”

Section: Introductionmentioning

confidence: 99%

Thickness Dependence of Structure and Optical Characteristics in Fluorine-Doped SnO₂ Films Grown by Spray Pyrolysis Method

Oshima¹,

Yoshino²

2012

Jpn. J. Appl. Phys.

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Transparent conducting thin films of fluorine-doped SnO2 were deposited on glass substrates by a spray pyrolysis technique in order to investigate the effect of film thickness. These films were prepared at a substrate temperature of 500 °C. The thickness of the samples was between approximately 70 nm and 1.5 µm. The preferred grain orientation of the films varied with increasing film thickness. The grain size of the surface increased with increasing film thickness. Crystal growth occurred at several stages of film growth. In the first stage, pores were formed in the film. Secondly, the grains grew in two dimensions and completely coved the substrate surface. Finally, the grains became columnar crystals with increasing film thickness. The electrical resistivity decreased with increasing film thickness although this was accompanied by a decrease in optical transmittance. The IR absorption increased despite a constant carrier concentration. Film thickness also increased. This result meant that with a constant high carrier concentration, the increased film thickness enhanced the absorption.

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Section: Introductionmentioning

confidence: 99%

Thickness Dependence of Structure and Optical Characteristics in Fluorine-Doped SnO₂ Films Grown by Spray Pyrolysis Method

Oshima¹,

Yoshino²

2012

Jpn. J. Appl. Phys.

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Dependence of of thickness F-doped SnO<inf>2</inf> films grown by spray pyrolysis technique

Cited by 1 publication

References 11 publications

Thickness Dependence of Structure and Optical Characteristics in Fluorine-Doped SnO₂ Films Grown by Spray Pyrolysis Method

Thickness Dependence of Structure and Optical Characteristics in Fluorine-Doped SnO₂ Films Grown by Spray Pyrolysis Method

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Dependence of of thickness F-doped SnO<inf>2</inf> films grown by spray pyrolysis technique

Cited by 1 publication

References 11 publications

Thickness Dependence of Structure and Optical Characteristics in Fluorine-Doped SnO2 Films Grown by Spray Pyrolysis Method

Thickness Dependence of Structure and Optical Characteristics in Fluorine-Doped SnO2 Films Grown by Spray Pyrolysis Method

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Thickness Dependence of Structure and Optical Characteristics in Fluorine-Doped SnO₂ Films Grown by Spray Pyrolysis Method

Thickness Dependence of Structure and Optical Characteristics in Fluorine-Doped SnO₂ Films Grown by Spray Pyrolysis Method