1959
DOI: 10.1063/1.1735008
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Density Measurements of Some Thin Copper Films

Abstract: Density measurements have been made on vacuum-deposited copper films in the thickness ranges 50 to 150 A and 500 to 1000 A. To obtain the density, an analysis was made of the relation between the reflection coefficient and the glancing angle of incidence for 1.54 A x-rays. For films in the range 500 to 100 A, this analysis was augmented by a chemical determination of the average mass per unit area. Although there is evidence of nonuniform density with depth in the film, especially for the very thin films, the … Show more

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Cited by 61 publications
(14 citation statements)
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“…Weighed amounts of the metals, in the form of 7-to 15-mil wire at least 99.95% pure, were evaporated from heated tungsten filaments to give a film thickness of 100 Α., by assuming the density of the film to be the same as that of bulk metal [12,19].…”
Section: Methodsmentioning
confidence: 99%
“…Weighed amounts of the metals, in the form of 7-to 15-mil wire at least 99.95% pure, were evaporated from heated tungsten filaments to give a film thickness of 100 Α., by assuming the density of the film to be the same as that of bulk metal [12,19].…”
Section: Methodsmentioning
confidence: 99%
“…In Parratt ' s studies [4] , the theory was set out on how to apply the technique to multilayer samples in order to extract an electron density profi le of the surface region. In 1959, X -ray refl ectometry was used to determine the density of copper fi lms [21] , and in 1960 the annealing and oxidation of evaporated fi lms of Cu, Ni, Ge, and Se was studied [22] . However, the technique remained relatively obscure until further investigations were conducted during the 1970s [15,16] , whereby surface and interfacial roughness could be taken into account in the analysis procedures.…”
Section: Grazing Incidence X -Ray Refl Ectivity ( Gxrr )mentioning
confidence: 99%
“…Quantitative estimation of the thickness of the layer in which lead ions are distributed can be obtained by fitting model calculations to the Pb fluorescence data. For calculating the reflectivity and the intensity of the fluorescence yield from protein/lipid film the recursive method developed by Parratt (Wainfan et al, 1959) has been used. The best fit of the Pb fluorescence data corresponds to a thickness of the Pb layer of 13 nm for sample 1 and 1 nm for sample 2.…”
Section: Samples 1 Andmentioning
confidence: 99%