2003
DOI: 10.1016/s0166-1280(03)00406-8
|View full text |Cite
|
Sign up to set email alerts
|

Density functional study of gas–surface reactivity: GeH4 dissociative adsorption onto semiconductor surfaces

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
2
1

Citation Types

0
3
0

Year Published

2004
2004
2012
2012

Publication Types

Select...
6

Relationship

2
4

Authors

Journals

citations
Cited by 7 publications
(3 citation statements)
references
References 24 publications
0
3
0
Order By: Relevance
“…In this paper, we therefore present our thorough DFT [15] study to reexamine the overall reaction profiles for CH 2(ads) and CX 3(ads) (XAH and F) on the Ag(111) surface to form an isolated CH 2 ACX 2(g) through the CH 2 insertion into AgOCX 3 bond followed by ␤OX elimination. Particularly, we apply the partial structure constraint path minimization (PSCPM) method [16,17] with chemical intuition to determine the possible transition-state structures and the corresponding energy barriers along the energetically more favorable paths. We are hoping that all these calculated results will allow us to compare the relative rates of both CH 2 insertion into AgOCX 3 bond and ␤OX elimination to form an isolated CH 2 ACX 2(g) on the Ag(111) surface and to give a microscopic insight into factors governing the formation rate of an isolated CH 2 ACX 2(g) for complementing the experimental data.…”
Section: Introductionmentioning
confidence: 99%
“…In this paper, we therefore present our thorough DFT [15] study to reexamine the overall reaction profiles for CH 2(ads) and CX 3(ads) (XAH and F) on the Ag(111) surface to form an isolated CH 2 ACX 2(g) through the CH 2 insertion into AgOCX 3 bond followed by ␤OX elimination. Particularly, we apply the partial structure constraint path minimization (PSCPM) method [16,17] with chemical intuition to determine the possible transition-state structures and the corresponding energy barriers along the energetically more favorable paths. We are hoping that all these calculated results will allow us to compare the relative rates of both CH 2 insertion into AgOCX 3 bond and ␤OX elimination to form an isolated CH 2 ACX 2(g) on the Ag(111) surface and to give a microscopic insight into factors governing the formation rate of an isolated CH 2 ACX 2(g) for complementing the experimental data.…”
Section: Introductionmentioning
confidence: 99%
“…With our GS-MBE method, the Si substrate was exposed to GeH 4 without gas-phase thermal cracking and it has been reported that GeH 4 is thermally decomposed on the Si(001) surface and initial Ge adsorbates are hydrides such as GeH 3 and GeH 2 . [25][26][27] However, adsorbates formed with the sputter epitaxy method are basically nonhydrogenated Ge. In analogy with the fact that the binding energies between silicon hydrides and Si(001) are smaller than those between bare Si and Si(001), [28][29][30] bare Ge is expected to be less movable on a Si surface than Ge hydrides, and we have also reported that the experimentally measured Ge migration length on Si(001) with the sputter epitaxy method is shorter than that with the GS-MBE method.…”
Section: Flattening Mechanism Of Ge Layer On Heavily P-dopedmentioning
confidence: 99%
“…A few years ago we performed total energy calculations based on density functional theory to study the structural and electronic properties of adsorbed silane on both Si(100) and Ge(100) surfaces. , To realize the different electronic states from these two surfaces and their effects on the SiH 4 adsorption reaction mechanisms, we also calculated the PDOS for the surface layer of both surfaces. Indeed, these calculated PDOS showed that the higher electronic states from both surfaces play an important role in governing the reactivity for the SiH 4 adsorption reaction on these two surfaces.…”
Section: Introductionmentioning
confidence: 99%