Density Doubling of Block Copolymer Templated Features

Wu, Nathanael L. Y.; Zhang, Xiaojiang; Murphy, Jeffrey J.; Chai, Jinan; Harris, Kenneth D. M.; Buriak, Jillian M.

doi:10.1021/nl203488a

Cited by 39 publications

(48 citation statements)

References 36 publications

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“…Due to the interplay between these opposing forces, the temperature of the maximum growth rate of well-ordered "grains" of block copolymer can be well below T ODT . 23,24 With few exceptions, 25,26 block copolymer thin films intended for DSA lithography applications are one or a few periods in thickness 27 and inherently must contend with reduced dimensionality. Such copolymers have short blocks that are highly incompatible and a low overall molecular weight.…”

Section: Introductionmentioning

confidence: 99%

“…(T =25, 171, 180, 190, 200, 210, 220 °C) (α i = 0.20 °) R1 and R2 denote the selected scattering peaks from the reflected X-ray beam while T1 comes from the transmitted X-ray beam. (T =25, 171, 180, 190, 200, 210, 220 °C) (α i = 0.20 °) R1 and R2 denote the selected scattering peaks from the reflected X-ray beam while T1 comes from the transmitted X-ray beam.…”

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confidence: 99%

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Order–disorder transition in thin films of horizontally-oriented cylinder-forming block copolymers: thermal fluctuations vs. preferential wetting

Kim

Fredrickson

et al. 2016

Soft Matter

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We present experimental and theoretical investigations of the order-disorder transition (ODT) in thin films of cylinder-forming diblock copolymers with asymmetric wetting conditions. Grazing incidence small-angle X-ray scattering (GISAXS) was implemented to determine the ODT temperatures (TODT) for poly(styrene-b-2-vinyl pyridine) (PS-P2VP) block copolymer thin films on a P2VP-preferential silicon substrate. Specifically, films consisting of multilayers of horizontally-oriented cylindrical structures (from 1- to 9-layers) were tested. We find that films with more than 2 cylindrical layers have a TODT comparable to the bulk case. However, TODT decreases as the film becomes thinner and the monolayer system has an ODT 30 °C below the bulk. Using self-consistent field theory (SCFT), we studied the ordering in corresponding thin films with asymmetric (top and bottom surface) wetting conditions. Surprisingly, SCFT is found to predict an opposite trend in TODT with film thickness than observed experimentally. Field-theoretic simulations with complex Langevin sampling were employed to resolve this discrepancy and demonstrate that thermal fluctuations in the PS-P2VP thin-film system dominate its ordering behavior in monolayer and bilayer films.

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Section: Introductionmentioning

confidence: 99%

mentioning

confidence: 99%

Order–disorder transition in thin films of horizontally-oriented cylinder-forming block copolymers: thermal fluctuations vs. preferential wetting

Kim

Fredrickson

et al. 2016

Soft Matter

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“…A drop of clean swollen nanosphere suspension was dropped on a copper grid and blow-dried for TEM characterization. In our case, the diameter of PS-b -P2VP nanospheres is over 500 nm (Figure 2 ), and the repeat period of PS(23.6k)-b -P2VP(10.4k) is about 30 ± 6 nm, [ 46 ] so the d/L value is beyond that in their simulation study. These complex nanospheres were also characterized by TEM.…”

Section: Methodsmentioning

confidence: 52%

The Influences of Cooperative Swelling and Coordination on Patterned Decoration of Gold on Block Copolymer Nanospheres

Wang

Mei

Jin

2013

Macro Chemistry & Physics

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Ordered nanoring arrays are a new pattern of block copolymer thin fi lms generated by spincoating of block copolymer reverse micelles on silicon substrates, which can further direct the formation of gold nanoring arrays on block copolymer thin fi lms. Here, it is reported that the cooperation of swelling and coordination can infl uence the surface pattern of the block copolymer nanospheres. A hexagonally arranged dot pattern can be transformed into a ring pattern on polystyrene-blockpoly(2-vinylpyridine) nanospheres, and the new pattern can further direct the decoration of gold nanoparticles by balancing the swelling of the poly(2-vinylpyridine) chains and the coordination effect between gold ions and the pyridine units.

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“…[ 143 ] A detailed study on the loading time of precursor (30 seconds to 40 minutes) allowed the researchers to correlate the mean diameter size of Fe 2 O 3 nanoparticles to the number of CNTs grown. A work in 2012 by Wu et al [ 137 ] demonstrated the true potential of BCP lithography to address ever decreasing technology nodes. The authors reported a method of forming bilayers of cylinder PS-b -P2VP structures through controlled swelling conditions.…”

Section: Reviewmentioning

confidence: 99%

Strategies for Inorganic Incorporation using Neat Block Copolymer Thin Films for Etch Mask Function and Nanotechnological Application

et al. 2016

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Block copolymers (BCPs) and their directed self-assembly (DSA) has emerged as a realizable complementary tool to aid optical patterning of device elements for future integrated circuit advancements. Methods to enhance BCP etch contrast for DSA application and further potential applications of inorganic nanomaterial features (e.g., semiconductor, dielectric, metal and metal oxide) are examined. Strategies to modify, infiltrate and controllably deposit inorganic materials by utilizing neat self-assembled BCP thin films open a rich design space to fabricate functional features in the nanoscale regime. An understanding and overview on innovative ways for the selective inclusion/infiltration or deposition of inorganic moieties in microphase separated BCP nanopatterns is provided. Early initial inclusion methods in the field and exciting contemporary reports to further augment etch contrast in BCPs for pattern transfer application are described. Specifically, the use of evaporation and sputtering methods, atomic layer deposition, sequential infiltration synthesis, metal-salt inclusion and aqueous metal reduction methodologies forming isolated nanofeatures are highlighted in di-BCP systems. Functionalities and newly reported uses for electronic and non-electronic technologies based on the inherent properties of incorporated inorganic nanostructures using di-BCP templates are highlighted. We outline the potential for extension of incorporation methods to triblock copolymer features for more diverse applications. Challenges and emerging areas of interest for inorganic infiltration of BCPs are also discussed.

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Density Doubling of Block Copolymer Templated Features

Cited by 39 publications

References 36 publications

Order–disorder transition in thin films of horizontally-oriented cylinder-forming block copolymers: thermal fluctuations vs. preferential wetting

Order–disorder transition in thin films of horizontally-oriented cylinder-forming block copolymers: thermal fluctuations vs. preferential wetting

The Influences of Cooperative Swelling and Coordination on Patterned Decoration of Gold on Block Copolymer Nanospheres

Strategies for Inorganic Incorporation using Neat Block Copolymer Thin Films for Etch Mask Function and Nanotechnological Application

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