2015
DOI: 10.1088/0960-1317/25/2/025013
|View full text |Cite
|
Sign up to set email alerts
|

Dense vertical SU-8 microneedles drawn from a heated mold with precisely controlled volume

Abstract: Drawing lithography technology has recently become a popular technique to fabricate (3D) microneedles. The conventional drawing process shows some limitations in fabricating dense, scale-up and small microneedles. In this study, we demonstrate a new drawing lithography process from a self-loading mold which is able to overcome these challenges. Different from the conventional molds which have difficult alignment and loading issues, a released SU-8 membrane is attached onto a SU-8 coated wafer to generate an in… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
2
1
1

Citation Types

0
15
0

Year Published

2015
2015
2024
2024

Publication Types

Select...
10

Relationship

3
7

Authors

Journals

citations
Cited by 26 publications
(16 citation statements)
references
References 51 publications
0
15
0
Order By: Relevance
“…Next, a 300-μm SU-8 2100 layer was deposited by two continuous spin-coating processes, which were patterned into the SU-8 pillar array (Figure 2e). The SU-8 sharp tips were formed using the drawing lithography technology we reported previously [31][32][33] ( Figure 2f). Drawing lithography technology is a maskless fabrication approach to build 3D structures based on the polymers' different viscosities under different temperatures.…”
Section: Materials and Methods Design Of The Flexible Microneedle Elementioning
confidence: 99%
“…Next, a 300-μm SU-8 2100 layer was deposited by two continuous spin-coating processes, which were patterned into the SU-8 pillar array (Figure 2e). The SU-8 sharp tips were formed using the drawing lithography technology we reported previously [31][32][33] ( Figure 2f). Drawing lithography technology is a maskless fabrication approach to build 3D structures based on the polymers' different viscosities under different temperatures.…”
Section: Materials and Methods Design Of The Flexible Microneedle Elementioning
confidence: 99%
“…However, drawing lithography also has demerits. Xiang et al pointed out that drawing lithography was limited by alignment and material loading [50]. It was hard to produce dense, scale-up, and small MNs.…”
Section: Drawing Lithographymentioning
confidence: 99%
“…High aspect-ratio (HAR) micropillars have been attracting an increasing level of research interest thanks to their unique mechanical and optical properties. They are already playing crucial roles in biomimetic dry adhesives 1 , 2 , super-hydrophobic surfaces 3 5 , microneedles for drug delivery 6 , tunable optical windows 7 , 8 , actuators 9 , air flow sensors 10 , and nanonewton-scale force sensors 11 , 12 . A number of materials have been utilized for the realization of HAR micropillars 13 .…”
Section: Introductionmentioning
confidence: 99%