2023 7th IEEE Electron Devices Technology &Amp; Manufacturing Conference (EDTM) 2023
DOI: 10.1109/edtm55494.2023.10102993
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Demonstration of Ultra-thin Ferroelectric/dielectric and Anti-ferroelectric/dielectric Bilayers for Future DRAM Cell Capacitors

Dong Hack Suh
1
,
Won-Tae Koo
2
,
Youngmo Kim
3
et al.
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