2021
DOI: 10.1364/ol.432359
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Demonstration of the DC-Kerr effect in silicon-rich nitride

Abstract: We demonstrate the DC-Kerr effect in PECVD Silicon-rich Nitride (SRN) and use it to demonstrate a third order nonlinear susceptibility, 𝝌 (𝟑) , as high as (6 + 0.58)x10 -19 m 2 /v 2 . We employ spectral shift versus applied voltage measurements in a racetrack ring resonator as a tool by which to characterize the nonlinear susceptibilities of these films. In doing so we demonstrate a 𝝌 (𝟑) larger than that of silicon and argue that PECVD SRN can provide a versatile platform for employing optical phase-shi… Show more

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Cited by 10 publications
(3 citation statements)
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“…The high VπL of our device is made possible by the combination of its vertical cylindrical topology, hybrid plasmonic guided modes, relatively high r33 of SRN, and Fabry-PĂ©rot resonance in the vertical direction of propagation. Furthermore, the device's performance can be further improved by utilizing a nonlinear material such as silicon-rich nitride (SRN), which has been shown to demonstrate a third-order nonlinear susceptibility, χ 3 , as high as (6 ± 0.58) × 10 −19 m 2 /V with an index equals to 3.01 [11].…”
Section: Discussionmentioning
confidence: 99%
See 1 more Smart Citation
“…The high VπL of our device is made possible by the combination of its vertical cylindrical topology, hybrid plasmonic guided modes, relatively high r33 of SRN, and Fabry-PĂ©rot resonance in the vertical direction of propagation. Furthermore, the device's performance can be further improved by utilizing a nonlinear material such as silicon-rich nitride (SRN), which has been shown to demonstrate a third-order nonlinear susceptibility, χ 3 , as high as (6 ± 0.58) × 10 −19 m 2 /V with an index equals to 3.01 [11].…”
Section: Discussionmentioning
confidence: 99%
“…The oval shape of the mode is due to the superposition of degenerate TE and TM modes. The vertical polarization in Figures 2(a Silicon Rich Nitride (SRN) as a nonlinear material provides an optimal material since the material index often combines second and third-order nonlinear susceptibility contributions; this is due to the contribution of Pockets and DC-Kerr effects, respectively [11]. Moreover, SRN has lower optical loss and higher breaking voltage [12,13] The utilized SRN has been characterized to have χ(2) of 22.7 pm/V at a refractive index of 2.25 [14].…”
Section: Design and Simulationsmentioning
confidence: 99%
“…Additionally, even though the physical mechanism that gives rise to the emission of light in SiN films has not been clarified yet, control over the Si nitride films by a doping process using nitrogen atoms by ion-implantation (which is a fully CMOS compatible technique) has been reported [11]. On the other hand, Si-rich silicon nitride has also been reported to present enhanced Kerr nonlinearity with respect to the standard stoichiometric Si 3 N 4 materials [6,8,[12][13][14].…”
Section: Introductionmentioning
confidence: 99%