Demonstration of sub-1 Hz structural symmetry in micro-glassblown wineglass resonators with integrated electrodes

Senkal, Doruk; Ahamed, Mohammed Jalal; Trusov, Alexander A.; Shkel, Andrei M.

doi:10.1109/transducers.2013.6627035

Cited by 8 publications

(8 citation statements)

References 12 publications

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“…This paper focuses on improvements in fabrication process to incorporate in-situ electrode structures, Fig. 1, [15] as well as further improvement in as-fabricated frequency split, demonstrating f < 1 Hz. This demonstration supports our hypothesis that surface tension and pressure driven micro-glassblowing process results in highly symmetric micro-wineglass structures.…”

Section: Introductionmentioning

confidence: 99%

Achieving Sub-Hz Frequency Symmetry in Micro-Glassblown Wineglass Resonators

Senkal

Ahamed

Trusov

et al. 2014

J. Microelectromech. Syst.

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We demonstrate, for the first time, sub-1 Hz frequency symmetry in micro-glassblown wineglass resonators with integrated electrode structures. A new fabrication process based on deep glass dry etching was developed to fabricate microwineglasses with self-aligned stem structures and integrated electrodes. The wineglass modes were identified by electrostatic excitation and mapping the velocity of motion along the perimeter using laser Doppler interferometry. A frequency split ( f ) of 0.15 and 0.2 Hz was demonstrated for n = 2 and n = 3 wineglass modes, respectively. To verify the repeatability of the results, a total of five devices were tested, three out of five devices showed f < 5 Hz. Frequency split stayed below 1 Hz for dc bias voltages up to 100 V, confirming that the low frequency split is attributed to high structural symmetry and not to capacitive tuning. High structural symmetry (<1 Hz) and atomically smooth surfaces (0.23 nm Sa) of the resonators may enable new classes of high performance 3-D MEMS devices, such as rate-integrating MEMS gyroscopes.

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Section: Introductionmentioning

confidence: 99%

Achieving Sub-Hz Frequency Symmetry in Micro-Glassblown Wineglass Resonators

Senkal

Ahamed

Trusov

et al. 2014

J. Microelectromech. Syst.

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“…The device, shown in Figure 1, is a 1 mm diameter, 250 μm deep hemispherical resonator formed from 1 μm thick MCD. The device diameter is four and six times smaller than gyro designs reported in [1][2], respectively. Eight boron doped polysilicon electrodes are embedded in the silicon cavity surrounding the hemispherical resonator with a 1 μm capacitive gap.…”

Section: Design and Fabricationmentioning

confidence: 74%

Micro-Scale Diamond Hemispherical Resonator Gyroscope

Taheri-Tehrani¹,

Su²,

Heidari³

et al. 2014

2014 Solid-State, Actuators, and Microsystems Workshop Technical Digest

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This paper concerns a micro-scale gyroscope based on a 1 mm diameter diamond hemispherical resonator with embedded polysilicon electrodes. Frequency mismatch and quality factor of the wineglass vibration modes are studied. The device has embedded electrodes used for electrostatic transduction of resonator vibration and for electrostatic mode-matching. The air gap between the resonator and electrodes is small to increase the frequency tuning range for a given supply voltage. The 2θ-mode resonant frequency mismatch can be minimized from 2.4% to 0.1% by applying a low 2.5V tuning voltage.

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“…A new approach to this process involves etching deep cavities in silicon to increase the volume of trapped air, similar to the process of plastically deforming silicon [ 84 ]. This technique, in combination with integrated electrodes, is promising for the fabrication of HRGs [ 86 ].…”

Section: Microscale Hrg Fabrication Methods and Materialsmentioning

confidence: 99%

Recent Advances in MEMS-Based 3D Hemispherical Resonator Gyroscope (HRG)—A Sensor of Choice

Ranji

Damodaran

et al. 2022

Micromachines

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Macro-scale, hemispherical-shaped resonating gyroscopes are used in high-precision motion and navigation applications. In these gyroscopes, a 3D wine-glass, hemispherical-shaped resonating structure is used as the main sensing element. Motivated by the success of macroscale hemispherical shape gyroscopes, many microscale hemispherical-shaped resonators have been produced due to the rapid advancement in semiconductor-based microfabrication technologies. The dynamic performance of hemispherical resonators depends on the degree of symmetry, uniformity of thickness, and surface smoothness, which, in turn, depend on the type of materials and fabrication methods. The main aim of this review paper is to summarize the materials, characterization and fabrication methods reported in the literature for the fabrication of microscale hemispherical resonator gyroscopes (µHRGs). The theory behind the development of HRGs is described and advancements in the fabrication of microscale HRGs through various semiconductor-based fabrication techniques are outlined. The integration of electrodes with the hemispherical structure for electrical transduction using other materials and fabrication methods is also presented. A comparison of different materials and methods of fabrication from the point of view of device characteristics and dynamic performance is discussed. This review can help researchers in their future research and engineers to select the materials and methods for µHRG development.

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Demonstration of sub-1 Hz structural symmetry in micro-glassblown wineglass resonators with integrated electrodes

Cited by 8 publications

References 12 publications

Achieving Sub-Hz Frequency Symmetry in Micro-Glassblown Wineglass Resonators

Achieving Sub-Hz Frequency Symmetry in Micro-Glassblown Wineglass Resonators

Micro-Scale Diamond Hemispherical Resonator Gyroscope

Recent Advances in MEMS-Based 3D Hemispherical Resonator Gyroscope (HRG)—A Sensor of Choice

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