Demonstration of soft x-ray laser of Ne-like Ar at 698 nm pumped by capillary discharge

Zhao, Yijun; Jiang, Shan; Xie, Yong‐Rong; Yang, Dongyu; Shupeng, Teng; Chen, Deying; Wang, Qi

doi:10.1364/ol.36.003458

Cited by 25 publications

(14 citation statements)

References 16 publications

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“…The typical waveform of the main current is similar to the one reported in Ref. [23]. The amplitude of the main current is 12 kA, and the 10-90 % rise time is 40 ns.…”

Section: Resultssupporting

confidence: 77%

“…According to the experimental results about the spectrum in Ref. [23], the multi-wavelength laser pulse should include three laser lines at 46.9, 69.8 and 72.6 nm. In order to, respectively, observe temporal characteristics of the three Ne-like Ar lasers, a VUV monochromator combined with an XRD was used to measure the laser pulse.…”

Section: Resultsmentioning

confidence: 99%

“…4 of Ref. [23]. The spectra were used to analyze the effects of initial pressure and plasma length on intensity of multi-wavelength laser.…”

Section: Resultsmentioning

confidence: 99%

“…The capillary discharge setup used to conduct the experiments was described in the previous publications [23,24]. The main pulse generator consists of a 7 nF Blumlein line filled with de-ionized water.…”

Section: Methodsmentioning

confidence: 99%

“…In 2011, our group firstly demonstrated Ne-like Ar EUV laser at 69.8 nm (C line) and relatively weak laser at 72.6 nm (E line) [23]. In the initial experiments, a gain coefficient of 0.34 cm −1 and gain-length product of 11 were obtained at 69.8 nm in 35-cm-long plasma column generated by capillary discharge.…”

Section: Introductionmentioning

confidence: 99%

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Characteristics of a multi-wavelength Ne-like Ar laser excited by capillary discharge

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other applications. In 1994, J. J. Rocca et al. reported the first demonstration of large soft X-ray amplification in the plasma of a capillary discharge [1]. A population inversion between 2p 5 3p 1 S 0 and 2p 5 3s 1 P 1 (J = 0-1) in the Ne-like Ar ions was produced by the electron collisional excitation, and the gain coefficient at 46.9 nm (A line) was measured as 0.6 cm −1 . A saturated Ne-like Ar soft X-ray laser at 46.9 nm pumped by capillary discharge has produced millijoule-level laser pulses at a repetition rate of 4 Hz [2] and has led to many applications such as the diagnostics of dense plasma [3], lithography [4], nanoimaging [5], nanomachining [6] and material ablation [7].Other groups also had developed 46.9 nm laser pumped by capillary discharge [8][9][10][11][12][13][14][15][16]. Some groups studied the 46.9 nm laser with a low current, which is benefit to reduce the size and enhance the repetitive frequency of the laser. G. Niimi et al. firstly reported the observation of 46.9 nm laser output at a low discharge current of 9 kA [8]. G. Tomassetti et al. reported that 46.9 nm laser was realized with low amplitude 17-20 kA current pulses at pulse repetition rate up to 0.1 Hz [9]. The saturated laser at 46.9 nm was achieved by C. A. Tan et al. using the main current as low as 16 kA [13]. However, the other Ne-like Ar lasers were not observed by these groups.Except for J = 0-1 transition at 46.9 nm, EUV lasers can also be expected on some other 3p-3s transitions of Ne-like Ar in principle. The populations and gain coefficients of the 3p-3s transitions in Ne-like Ar were investigated by D. E. Kim et al. in theory [17]. It was found that large gains on the 3p 1 S 0 -3s 1 P 1 (J = 0-1), 3p 3 P 2 -3s 1 P 1 (J = 2-1) and 3p 3 D 2 -3s 3 P 1 (J = 2-1) transitions were formed for the electron density between 10 18 and 10 19 cm −3 . Due to the observation of intense laser on 3p 1 S 0 -3s 1 P 1 (J = 0-1) transition at 46.9 nm (A line), the two other lasers on 3p 3 P 2 -3s 1 P 1 (J = 2-1) transition at 69.8 nm (C line) and 3pAbstract We report the characteristics of 46.9, 69.8 and 72.6 nm lasers of Ne-like Ar in a plasma column pumped by capillary discharge. A main current of 12 kA with rise time of 40 ns was used to generate the plasma in a 35-cmlong capillary. The temporal and spatial characteristics of 46.9 and 69.8 nm laser pulses were measured. The time of lasing onset for the two lasers is about 35 ns. The pulse widths are about 1.3 ns for 46.9 nm laser and 1.2 ns for 69.8 nm laser. The FWHM beam divergences of the 46.9 and 69.8 nm lasers are approximately 0.5 and 0.4 mrad, respectively. The initial pressure ranges for 46.9, 69.8 and 72.6 nm lasers correspond to 13-24, 12.5-20 and 14-20 Pa, respectively. A gain coefficient of 0.58 cm −1 was measured and gain saturation behavior was observed at 46.9 nm, conditioning the initial pressure of 19 Pa. At the same discharge current, a 69.8 nm laser with gain coefficient of 0.41 cm −1 and a 72.6 nm laser with gain coefficient of 0.22 cm −1 were achieved by changing...

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“…The typical waveform of the main current is similar to the one reported in Ref. [23]. The amplitude of the main current is 12 kA, and the 10-90 % rise time is 40 ns.…”

Section: Resultssupporting

confidence: 77%

Section: Resultsmentioning

confidence: 99%

“…4 of Ref. [23]. The spectra were used to analyze the effects of initial pressure and plasma length on intensity of multi-wavelength laser.…”

Section: Resultsmentioning

confidence: 99%

Section: Methodsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Characteristics of a multi-wavelength Ne-like Ar laser excited by capillary discharge

et al. 2016

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Characterization of the 46.9-nm soft X-ray laser beam from a capillary discharge

et al. 2014

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Effects of pre-pulse current on Ne-like Ar laser at 72.6 nm excited by capillary discharge

Bai

Zhao²,

An³

et al. 2022

Appl. Phys. B

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At present, research on the capillary discharge plasma Ne-like Ar 72.6 nm laser is insufficient, and additional experimental studies are supposed to determine the experimental parameters of the laser. Thus the effects of the pre-pulse current and the delay time between pre-pulse and mainpulse on the 72.6 nm laser are investigated in this paper. We employed 3.2 mm inner diameter capillaries with 35 cm and 45 cm lengths in the experiment. The experiment was conducted with the main-pulse current amplitude of 17.5 kA, the initial Ar pressure of 14-21 Pa, the pre-pulse and main-pulse delay time of 3.5-54.5 µs, and the pre-pulse current amplitude of 9.0-66.8 A. The intensity of the 72.6 nm laser was measured with different experimental parameters. The experimental results indicate that the intensity of 72.6 nm laser is maximum with the initial Ar pressure of 16 Pa, the pre-pulse and main-pulse delay time of 20 µs, and the pre-pulse current amplitude of 18.4 A in the 45 cm long capillary.

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Demonstration of soft x-ray laser of Ne-like Ar at 698 nm pumped by capillary discharge

Cited by 25 publications

References 16 publications

Characteristics of a multi-wavelength Ne-like Ar laser excited by capillary discharge

Characteristics of a multi-wavelength Ne-like Ar laser excited by capillary discharge

Characterization of the 46.9-nm soft X-ray laser beam from a capillary discharge

Effects of pre-pulse current on Ne-like Ar laser at 72.6 nm excited by capillary discharge

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