Demonstration of PolyimideBased Flexible CMUT Operation on Curved Substrates

Lucarini, Ivano; Maiolo, Luca; Maita, Francesco; Savoia, Alessandro Stuart

doi:10.1109/ius52206.2021.9593842

Cited by 3 publications

(1 citation statement)

References 9 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Capacitive micromachined ultrasonic transducers can be fabricated on a soft polymer substrate with a narrow working frequency range and a costly manufacturing process. [ 9–15 ] Flexible piezoresistive sensors are manufactured with composite nanomaterials to build a conductive network that varies with external forces, with the merits of high sensitivity, economy, and simplicity but with deficiencies of hysteresis and nonlinearity. [ 16–22 ] Piezoelectric materials show the remarkable capability of vibration and ultrasound detection as self‐powered sensitive parts.…”

Section: Introductionmentioning

confidence: 99%

Ultra‐Broadband Flexible Thin‐Film Sensor for Sound Monitoring and Ultrasonic Diagnosis

Xia,

Sun,

Liu

et al. 2023

Small

View full text Add to dashboard Cite

Small‐scale and flexible acoustic probes are more desirable for exquisite objects like human bodies and complex‐shaped components than conventional rigid ones. Herein, a thin‐film flexible acoustic sensor (FA‐TES) that can detect ultra‐broadband acoustic signals in multiple applications is proposed. The device consists of two thin copper‐coated polyvinyl chloride films, which are stimulated by acoustic waves and contact each other to generate the triboelectric signal. Interlocking nanocolumn arrays fabricated on the friction surfaces are regarded as a highly adaptive spacer enabling this device to respond to ultra‐broadband acoustic signals (100 Hz–4 MHz) and enhance sensor sensitivity for film weak vibration. Benefiting from the characteristics of high shape adaptability and ultrawide response range, the FA‐TES can precisely sense human physiological sounds and voice (≤10 kHz) for laryngeal health monitoring and interaction in real‐time. Moreover, the FA‐TES flexibly arranged on a 3D‐printed vertebra model can effectively and accurately diagnose the inner defect by ultrasonic testing (≥1 MHz). It envisions that this work can provide new ideas for flexible acoustic sensor designs and optimize real‐time acoustic detections of human bodies and complex components.

show abstract

Section: Introductionmentioning

confidence: 99%

Ultra‐Broadband Flexible Thin‐Film Sensor for Sound Monitoring and Ultrasonic Diagnosis

Xia,

Sun,

Liu

et al. 2023

Small

View full text Add to dashboard Cite

show abstract

PMUT and CMUT Devices for Biomedical Applications: A Review

Moisello,

Novaresi,

Sarkar

et al. 2024

IEEE Access

View full text Add to dashboard Cite

Piezoelectric Micromachined Ultrasonic Transducers (PMUT) and Capacitive Micromachined Ultrasonic Transducers (CMUT) have seen great developments in recent years, both in terms of performance and scope of applications within the biomedical ultrasound domain. This paper presents a review of the state-of-the-art of PMUT and CMUT technologies, focusing on their principle of operation, microfabrication techniques and use in different biomedical imaging and therapeutic applications. The advantages and drawbacks of PMUT and CMUT technologies in comparison with conventional bulk transducers are highlighted, the trade-offs among PMUTs and CMUTs are discussed, and their relevance in the current landscape of medical diagnostics and therapeutic uses is outlined, thus providing a clear overview of these promising technologies for the present and the next generation biomedical ultrasound applications.

show abstract