2018
DOI: 10.7567/apex.11.064101
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Demonstration of high-responsivity epitaxial β-Ga2O3/GaN metal–heterojunction-metal broadband UV-A/UV-C detector

Abstract: We demonstrate epitaxial β-Ga 2 O 3 /GaN-based vertical metal-heterojunction-metal (MHM) broadband UV-A/UV-C photodetectors with high responsivity (3.7 A/W) at 256 and 365 nm, UV-to-visible rejection >10 3 , and a photo-to-dark current ratio of >100. A small (large) conduction (valence) band offset at the heterojunction of pulsed laser deposition (PLD)-grown β-Ga 2 O 3 on metal organic chemical vapor deposition (MOCVD)grown GaN-on-silicon with epitaxial registry, as confirmed by X-ray diffraction (XRD) azimuth… Show more

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Cited by 93 publications
(56 citation statements)
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“…Compared to the pure Ag and Au NP devices, the Ag 4 Au 3 alloy exhibited a higher photoresponse. For instance, the R , D , and EQE of Ag 4 Au 3 were 112 A W −1 , 2.4 × 10 12 jones, and 3.6 × 10 4 %, respectively, at 0.03 mW mm −2 of illumination power, which were higher than those of previously reported GaN-based UV photodetectors with Ag NPs [ 26 ], with various GaN films [ 40 , 44 48 ], and with graphene layers [ 49 51 ] as summarized in Table 1 . However, the Ag 3.5 Au 3.5 and Ag 3 Au 4 devices exhibited somewhat moderate photoresponses with decreasing trend as the Au ratio was increased.…”
Section: Resultsmentioning
confidence: 63%
“…Compared to the pure Ag and Au NP devices, the Ag 4 Au 3 alloy exhibited a higher photoresponse. For instance, the R , D , and EQE of Ag 4 Au 3 were 112 A W −1 , 2.4 × 10 12 jones, and 3.6 × 10 4 %, respectively, at 0.03 mW mm −2 of illumination power, which were higher than those of previously reported GaN-based UV photodetectors with Ag NPs [ 26 ], with various GaN films [ 40 , 44 48 ], and with graphene layers [ 49 51 ] as summarized in Table 1 . However, the Ag 3.5 Au 3.5 and Ag 3 Au 4 devices exhibited somewhat moderate photoresponses with decreasing trend as the Au ratio was increased.…”
Section: Resultsmentioning
confidence: 63%
“…Apart from the above work, direct combination of Ga 2 O 3 with GaN can lead to sensitive solar‐blind DUVPDs as well . For instance, Jaiswal et al recently tried to deposit Ga 2 O 3 on GaN epilayers using the microwave radiation technique.…”
Section: Ga2o3mentioning
confidence: 99%
“…Some groups have also grown gallium oxide on GaN templates owing to their smaller lattice mismatch and the advancement in GaN based thin film technology. [ 179–181 ] Weng et al. have reported the growth of Ga 2 O 3 by furnace oxidation of a GaN film.…”
Section: Current Scenario In the Field Of Gallium Oxide Pds—materials Designmentioning
confidence: 99%