Demonstration of an optically actuated ferrule-top device for pressure and humidity sensing

Gruca, Grzegorz; Chavan, D.C.; Rector, J.H.; Heeck, K.; Iannuzzi, Davide

doi:10.1016/j.sna.2012.11.011

Cited by 23 publications

(15 citation statements)

References 40 publications

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“…ent of ideal r like sured lative humidity (RH) sensors based on polymer films are sensitive to pressure and temperature, requiring correction procedures [4][5][6] . Several optical sensors capable of simultaneous measurement of ambient pressure and RH have been demonstrated, but with limited application for high humidity environments (RH>70%) 7,8 . The quartz crystal microbalance (QCM) is a commonly used sensor platform for vacuum deposition systems and gas sensing [9][10][11][12] but its use is limited when pressure and analyte concentration are changing simultaneously, and most experiments report results at isobaric and iso-humid conditions to avoid complicated correction procedures 4,13,14 .…”

mentioning

confidence: 99%

PEDOT:PSS/QCM-based multimodal humidity and pressure sensor

Muckley

Lynch

Kumar

et al. 2016

Sensors and Actuators B: Chemical

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mentioning

confidence: 99%

PEDOT:PSS/QCM-based multimodal humidity and pressure sensor

Muckley

Lynch

Kumar

et al. 2016

Sensors and Actuators B: Chemical

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“…By varying the power of the excitation laser, the static bending of the ferrule-top cantilever could be controlled [225]. The environmental humidity and pressure could be measured by introducing amplitude modulation to excite the vibrations of the device for resonance curve measurement.…”

Section: Other Methods Based Micro-machined Devicesmentioning

confidence: 99%

Recent Developments in Micro-Structured Fiber Optic Sensors

Chen

et al. 2017

Fibers

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Recent developments in fiber-optic sensing have involved booming research in the design and manufacturing of novel micro-structured optical fiber devices. From the conventional tapered fiber architectures to the novel micro-machined devices by advanced laser systems, thousands of micro-structured fiber-optic sensors have been proposed and fabricated for applications in measuring temperature, strain, refractive index (RI), electric current, displacement, bending, acceleration, force, rotation, acoustic, and magnetic field. The renowned and unparalleled merits of sensors-based micro-machined optical fibers including small footprint, light weight, immunity to electromagnetic interferences, durability to harsh environment, capability of remote control, and flexibility of directly embedding into the structured system have placed them in highly demand for practical use in diverse industries. With the rapid advancement in micro-technology, micro-structured fiber sensors have benefitted from the trends of possessing high performance, versatilities and spatial miniaturization. Here, we comprehensively review the recent progress in the micro-structured fiber-optic sensors with a variety of architectures regarding their fabrications, waveguide properties and sensing applications.

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“…Following these technological improvements, a variety of novel fiber-optic microsensors were demonstrated, including pressure sensors [ 76 ], acoustic emission detectors [ 77 ], and humidity and force transducers [ 78 , 79 ]. Sensing systems based on micromechanical transducers directly created on the top of a glass ferrule were also demonstrated for surface topography reconstruction and photoacoustic spectrometry [ 80 ].…”

Section: Merging Lof With Optomechanicsmentioning

confidence: 99%

Lab-On-Fiber Technology: A Roadmap toward Multifunctional Plug and Play Platforms

Pisco

Cusano

2020

Sensors

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This review presents an overview of the “lab-on-fiber technology” vision and the main milestones set in the technological roadmap to achieve the ultimate objective of developing flexible, multifunctional plug and play fiber-optic platforms designed for specific applications. The main achievements, obtained with nanofabrication strategies for unconventional substrates, such as optical fibers, are discussed here. The perspectives and challenges that lie ahead are highlighted with a special focus on full spatial control at the nanoscale and high-throughput production scenarios. The rapid progress in the fabrication stage has opened new avenues toward the development of multifunctional plug and play platforms, discussed here with particular emphasis on new functionalities and unparalleled figures of merit, to demonstrate the potential of this powerful technology in many strategic application scenarios. The paper also analyses the benefits obtained from merging lab-on-fiber (LOF) technology objectives with the emerging field of optomechanics, especially at the microscale and the nanoscale. We illustrate the main advances at the fabrication level, describe the main achievements in terms of functionalities and performance, and highlight future directions and related milestones. All achievements reviewed and discussed clearly suggest that LOF technology is much more than a simple vision and could play a central role not only in scenarios related to diagnostics and monitoring but also in the Information and Communication Technology (ICT) field, where optical fibers have already yielded remarkable results.

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Demonstration of an optically actuated ferrule-top device for pressure and humidity sensing

Cited by 23 publications

References 40 publications

PEDOT:PSS/QCM-based multimodal humidity and pressure sensor

PEDOT:PSS/QCM-based multimodal humidity and pressure sensor

Recent Developments in Micro-Structured Fiber Optic Sensors

Lab-On-Fiber Technology: A Roadmap toward Multifunctional Plug and Play Platforms

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