2023
DOI: 10.1109/jqe.2023.3238739
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Demonstration of an On-Chip TE-Mode Optical Circulator

Abstract: In this paper, an on-chip optical circulator on the InP-membrane-on-Si (IMOS) platform is demonstrated. The circulator is composed of two multi-mode interferometers (MMIs), four polarization converters (PCs), and a Cerium-doped Yttrium Iron Garnet (Ce:YIG) die. The Ce:YIG die is adhesively bonded on the InP membrane via a 125-nm thin bonding layer. Nonreciprocal phase shift (NRPS) is employed in the presence of a transverse magnetic field. The device works as a 4-port optical circulator with a maximum optical … Show more

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Cited by 5 publications
(4 citation statements)
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“…Reducing the thickness of the BCB layer as spun on the wafer has limitations. Examples of bonding of a die 25) with 25 nm thick BCB or a 4 × 4 mm garnet 26) with 125 nm thick BCB were demonstrated previously. However, in practice, it is highly challenging to achieve a defect-free bonding of a non-planar 3 inch wafer when using BCB thickness equal to or less than the maximum step height in the wafer topography.…”
Section: Methodsmentioning
confidence: 75%
“…Reducing the thickness of the BCB layer as spun on the wafer has limitations. Examples of bonding of a die 25) with 25 nm thick BCB or a 4 × 4 mm garnet 26) with 125 nm thick BCB were demonstrated previously. However, in practice, it is highly challenging to achieve a defect-free bonding of a non-planar 3 inch wafer when using BCB thickness equal to or less than the maximum step height in the wafer topography.…”
Section: Methodsmentioning
confidence: 75%
“…We designed two waveguide structures on the InP-on-insulator platform, corresponding to the feasible processes of direct bonding [ 39 , 40 ] and BCB adhesive bonding [ 36 , 41 ], respectively, as shown in Figure 2 a,b. For the direct-bonded waveguide structure, a single crystalline layer of Ce:YIG was grown on a (111)-oriented substituted gadolinium gallium garnet (SGGG) substrate.…”
Section: Resultsmentioning
confidence: 99%
“…Then, a layer of adhesion promoter AP3000 was applied and gently baked at 135 °C for 5 min to enhance the adhesion of BCB. Finally, under vacuum and continuous pressure, the Ce: YIG mold was placed into contact with the upper surface of the BCB [ 36 ]. Both waveguide structures exhibited asymmetric refractive index distributions in the y-direction and the underlying SiO 2 cladding was thick enough to block out the influence of the substrate.…”
Section: Resultsmentioning
confidence: 99%
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