Demonstration of a Microscale Heat Exchanger for a Silicon Micro Gas Turbine Engine

Sullivan, Shaun; Zhang, Xin; Ayón, Arturo A.; Brisson, J. G.

doi:10.1007/978-3-642-59497-7_373

Cited by 15 publications

(12 citation statements)

References 2 publications

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“…Cracking of PECVD oxides during the fabrication. (a) of a micro heat exchanger [14], (b) of a wafer for micromotor driven air compressors [28]. FIGURE 1.2.…”

Section: Changes Of Materials Microstructure: Certain Changes In Micrmentioning

confidence: 99%

“…The existence of tensile residual stress in thin film structures usually results in cracking of thin films. For example, Figure 1.1 [14] shows the tensile cracking of PECVD oxides during the fabrication of micro heat exchangers and micro motor driven compressors [14] [26] [28]. The compressive residual stress existed in MEMS could induce buckling failure in micro beams as shown in Figure 1.2 [2], or hillocks formulation during microelectronics fabrication [29].…”

Section: Changes Of Materials Microstructure: Certain Changes In Micrmentioning

confidence: 99%

“…For the field of microelectromechanical systems (MEMS) and microelectronics, the existing of residual stress can seriously influence the reliability and dynamical characteristics of devices [14], [26], [27]. For the structural integrity perspective, one must pre-determine or control the residual stress level to prevent structure failure.…”

Section: Changes Of Materials Microstructure: Certain Changes In Micrmentioning

confidence: 99%

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Techniques in Residual Stress Measurement for MEMS and Their Applications

Chen

Mems/Nems

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This chapter mainly focuses on the introduction of residual stress characterization of MEMS materials. The origin and classification of residual stress appearing in thin films and MEMS structures are firstly introduced and the essential background of necessary mechanics, which is utilized to convert the measured data into the final residual stress, is followed. Various types of residual stress characterization techniques conducted in MEMS scale are subsequently addressed and reviewed. Finally, a brief discuss on controlling residual stresses and on taking the advantage of residual stress in MEMS applications is briefly discussed.

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“…Cracking of PECVD oxides during the fabrication. (a) of a micro heat exchanger [14], (b) of a wafer for micromotor driven air compressors [28]. FIGURE 1.2.…”

Section: Changes Of Materials Microstructure: Certain Changes In Micrmentioning

confidence: 99%

Section: Changes Of Materials Microstructure: Certain Changes In Micrmentioning

confidence: 99%

Section: Changes Of Materials Microstructure: Certain Changes In Micrmentioning

confidence: 99%

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Techniques in Residual Stress Measurement for MEMS and Their Applications

Chen

Mems/Nems

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“…Hereby focus is especially put on technological requirements and low cost fabrication technology rather than on optimization for achieving maximal cycle efficiency [7]. Also at smaller scales, for micro gas turbines in the power range smaller than 3 kW, several micro recuperators are described in literature [8][9][10]. Thus far, almost no attention is paid to the generalization of these concepts in specific design rules.…”

Section: Introductionmentioning

confidence: 99%

Optimal micro channel recuperators for small-sized gas turbines

Baelmans

Rogiers

Eyndhoven

et al. 2008

2008 Second International Conference on Thermal Issues in Emerging Technologies

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Thermodynamic efficiencies based on the first and second law of thermodynamics are assessed for their use in the design of recuperators in small-sized gas turbines. It is shown that the first and second law cycle efficiency as well as the Witte-Shamsundar efficiency [1] for heat exchangers show a similar dependency on the heat exchanger pressure drops. This results in design relations for hydraulic diameter ratios and their related number of channels ratio. Further, it is shown that the WitteShamsundar efficiency focusing on heat exchanger inlet temperatures only can be used as a good approximation for the overall optimal recuperator design when also pressure drops over the recuperator are accounted for. However the approximation deteriorates with higher heat exchanger mass flow density and lower compressor ratio as well as with decreasing turbine inlet temperature ratio. Deviations from the full cycle efficiency considerations are assessed. It is concluded that the use of the WitteShamsundar efficiency for optimization of recuperators in small-sized applications like the 1.5 kW PowerMems gas turbine needs careful assessment.

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“…The design of the heat exchanger comprises of multiple small passages to improve the heat transfer rate. One of the design criteria of the recuperator is to minimise the pressure drop across these passages, where a large pressure drop can cause a reduction in thermal efficiency and subsequently reduces the MGT performance [13].…”

Section: Introductionmentioning

confidence: 99%

Micro Gas Turbine Range Extender - Validation Techniques for Automotive Applications

Shah¹,

McGordon²,

Amor-Segan³

et al. 2013

Hybrid and Electric Vehicles Conference 2013 (HEVC 2013)

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Copies of full items can be used for personal research or study, educational, or not-forprofit purposes without prior permission or charge. Provided that the authors, title and full bibliographic details are credited, a hyperlink and/or URL is given for the original metadata page and the content is not changed in any way. A note on versions:The version presented here is a working paper or pre-print that may be later published elsewhere. If a published version is known of, the above WRAP url will contain details on finding it. AbstractA Micro Gas Turbine (MGT) can be considered as an alternative to the internal combustion engine as a range extender for electric vehicles. The MGT produces less raw exhaust gaseous emissions such as HC and CO in aerospace and static applications compared to the internal combustion engine. In addition, the MGT weight is less than an equivalent internal combustion engine and potentially can reduce the level of CO 2 further in a vehicle application. However, the use of the MGT in an automotive domain has some unique technical and commercial requirements that will require new validation approaches. An air filtration system is known to be one of the important elements to characterise the performance and the emissions of the MGT. In the past, most of the efforts on MGT were focused on the vehicle development and packaging studies, where the technical requirements of the test standards for the air filtration system were not considered. Furthermore, the validation techniques of the air filtration system for automotive applications have different requirements to those of a large scale turbine for aerospace use. A test method has been developed to investigate the effect of the automotive air filtration system on the MGT's characteristics in terms of the electrical power output and potentially the gaseous emissions. The outcomes of the research have provided good understanding of the MGT validation process in the automotive applications. It addresses the potential challenges that may hamper the MGT range extender for hybrid electric vehicle development processes.

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Demonstration of a Microscale Heat Exchanger for a Silicon Micro Gas Turbine Engine

Cited by 15 publications

References 2 publications

Techniques in Residual Stress Measurement for MEMS and Their Applications

Techniques in Residual Stress Measurement for MEMS and Their Applications

Optimal micro channel recuperators for small-sized gas turbines

Micro Gas Turbine Range Extender - Validation Techniques for Automotive Applications

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