Abstract:Highly alternating CO 2 -cyclohexene oxide copolymer, namely poly(cyclohexene carbonate) (PCHC), considered potentially to be microelectronic sacrificial material, was successfully synthesized by copolymerization of cyclohexene oxide and CO 2 in the presence of SalenAl(O i Pr) catalyst. The obtained highly alternating PCHC copolymer were determined and proven to have superior thermal decomposition properties decomposing completely at 350 o C by thermogravimetric (TG) analysis under dynamic conditions. The thermal decomposition kinetics of the obtained PCHC was investigated by a different kinetic method using data from TG analysis. Based on the analytical, kinetic parameters were calculated and kinetic model of pyrolysis was proposed. TG-IR, Py-GC/MS, IR and