Abstracts-The interaction process of low energy copper, silver and gold clusters of different sizes (13, 27 and 39 atoms) and different energies of translational motion (100, 200, and 400 eV) with a Cu(100) surface has been investigated in the framework of classic molecular dynamics. A comparative analysis of the processes of atomic mixing and adsorption layer (adlayer) formation has been performed for bombarding clusters of dif ferent types, sizes, and translational motion energies.