Deformation Behavior and Fracture Strength of Single‐Crystal 4H‐SiC Determined by Microcantilever Bending Tests
Tsukaho Yahagi,
Tatsuki Ohji,
Hiroshi Yamaguchi
et al.
Abstract:In this study, the deformation behaviors and mechanical properties of 4H‐SiC single crystals are investigated using microcantilever beam specimens with two different sizes, A and B (A < B). Tensile stress is applied along <20> direction. Plastic deformation, or nonlinearity, is observed in the stress–strain curves, and yield stress, or proportional limit, coincides between the two specimens at ≈25 ± 2 GPa. Scanning transmission electron microscopy and transmission electron microscopy studies show that… Show more
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