Deformation and fracture of TiN coating on a Si(1 1 1) substrate during nanoindentation

An, Tong; Wang, L.L.; Tian, Hongwei; Wen, Mao; Zheng, Weitao

doi:10.1016/j.apsusc.2011.03.043

Cited by 8 publications

(3 citation statements)

References 16 publications

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“…An et al . () showed that the SEM gave better results than the AFM when studying the deformation mechanisms and fracture behavior of TiN coating on a Si (111) substrate. It was found that the AFM measurements could give an erroneous estimation of the diameter of the interfacial fracture between the coating and the substrate.…”

Section: Quantitative Informationmentioning

confidence: 99%

Reflection on the measurement and use of the topography of the indentation imprint

et al. 2013

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The goal of this paper is to study the main uses of the residual imprint of the indentation test. It also discusses the different technologies and methods employed in this context. The difficulties encountered when trying to exploit the full potentials of the imprint are thoroughly examined. A survey of the literature on the quantification of the pile-up clearly shows that there is a lack of consensus on the measurement of the residual imprint as well as on treatment methods. Therefore, in order to widen the application fields of the indentation residual imprint, relevant and standardized indicators should be established.

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Section: Quantitative Informationmentioning

confidence: 99%

Reflection on the measurement and use of the topography of the indentation imprint

et al. 2013

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“…Thus, TiN coatings are widely used in medical applications [ 5 , 6 ] as well as aircraft and shipbuilding [ 7 ] to increase the wear resistance of cutting and processing tools [ 8 , 9 ]. For such applications, a large number of works on the characterization of TiN coatings deposited by various methods was fulfilled [ 10 , 11 , 12 , 13 , 14 ]. And to study the structure and properties, standard macromethods and equipment were used [ 9 , 15 , 16 , 17 ].…”

Section: Introductionmentioning

confidence: 99%

“…In [ 27 ], the wear-resistant properties of homogeneous (HM) and functionally graded (FG) TiN thin films were studied using nanoscratch testing. Utilizing nanoindentation, the deformation mechanisms and fracture behavior of TiN coatings were characterized [ 12 ]. In [ 13 ], nanoindentation and nanoscratch test methods were used to assess the influence of different nitrogen flow rates on the mechanical and microtribological properties of TiCrN coatings.…”

Section: Introductionmentioning

confidence: 99%

The Influence of Nitrogen Flow on the Stoichiometric Composition, Structure, Mechanical, and Microtribological Properties of TiN Coatings

Lapitskaya,

Nikolaev,

Khabarava

et al. 2023

Materials

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Utilizing reactive DC magnetron sputtering method, TiN coatings were deposited on the silicon substrates at different nitrogen flows and powers. A study of the X-ray phase composition of the coatings was carried out. The stoichiometric composition of the coatings was determined using energy dispersive x-ray spectroscopy. The structure of the surface, cross-section, and thickness of the coatings were determined using scanning electron (SEM) and atomic force microscopy (AFM). A significant change in the surface structure of TiN coatings was established with changes in deposition power and nitrogen flow. SEM images of cross-sections of all coated samples showed that the formation of coatings occurs in the form of a columnar structure with a perpendicular orientation relative to the silicon substrate. The mechanical properties (elastic modulus E and microhardness H) of TiN coatings of the first group demonstrate a maximum at a nitrogen flow of 3 sccm and are 184 ± 11 GPa and 15.7 ± 1.3 GPa, respectively. In the second group, the values of E and H increase due to a decrease in the size of the structural elements of the coating (grains and crystallites). In the third group, E and H decrease. Microtribological tests were carried out in 4 stages: at a constant load, multi-cycle for 10 and 100 cycles, and with increasing load. The coefficient of friction (CoF) and specific volumetric wear ω depend on the roughness, topology, and mechanical properties of the resulting coatings. Fracture toughness was determined using nanoscratch and depends on the mechanical properties of TiN coatings. Within each group, coatings with the best mechanical and microtribological properties were described: in the first group—TiN coating at 3 sccm (with (29.6 ± 0.1) at.% N), in the second group—TiN coating at 2 sccm (with (40.8 ± 0.2) at.% N), and in the third group—TiN coating at 1 sccm (c (37.3 ± 0.2) at.% N).

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Characterization of elastic modulus and hardness of brittle solids by instrumented indentation

Xu,

Liu,

Gong

2024

Acta Mech. Sin.

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Deformation and fracture of TiN coating on a Si(1 1 1) substrate during nanoindentation

Cited by 8 publications

References 16 publications

Reflection on the measurement and use of the topography of the indentation imprint

Reflection on the measurement and use of the topography of the indentation imprint

The Influence of Nitrogen Flow on the Stoichiometric Composition, Structure, Mechanical, and Microtribological Properties of TiN Coatings

Characterization of elastic modulus and hardness of brittle solids by instrumented indentation

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