Deformable piezoelectric mirrors with high density of control elements

Abstract

We have developed three types of deformable piezoelectric mirrors with a high density of control elements to compensate for the aberrations of the wavefront of high-power laser radiation that has passed through a turbulent atmosphere: bimorph and piezoactuator types. When creating correctors of the first type, laser engraving and microwelding methods were used, which made it possible to create a 30 mm bimorph mirror with 37 electrodes, compensated for wavefront aberrations up to the 7th order of the Zernike polynomials. The design of the piezoactuator mirrors provided for the possibility of replacing the piezoelectric stacks in the event of their failure, as well as thermal stabilization of the corrector's reflective substrate through the body of the actuators. Main parameters of all types deformable mirrors were investigated and compared.