The purpose of this study was to design a quadrupole secondary ion mass spectrometer for simultaneous detection of both positive and negative ions of different mass. An original setup based on a quadrupole electrostatic deflector configuration that allows energy and spatial separation of all types of secondary ions was proposed. The device was modeled using the SIMION 3D program before building the prototype. Trajectory and acceptance calculations were provided. Positive and negative secondary ion mass spectra for molybdenum test samples were obtained. Copyright # 1999 John Wiley & Sons Ltd. Received 16 February 1999; Revised 1 March 1999; Accepted 2 March 1999 Elemental compositions of samples with surfaces that are quickly and irreversibly destroyed by primary ion beam bombardment and containing both electropositive and electronegative components may be better evaluated by simultaneous analysis of positive and negative secondary ions. This allows a direct correlation between signal intensities from all ion species sputtered at the same time from the same bombarded area.Another interesting application of this technique is in the field of secondary ion mass spectrometry (SIMS) imaging, where simultaneous detection of secondary positive ions and secondary electrons may add topographical contrast to surface chemical images produced by ion bombardment.A design for an instrument for fast atom bombardment SIMS provided with simultaneous detection of positive and negative secondary ions has already been described. 1 In this spectrometer energy and space separation of the secondary ions with different polarity was obtained by a specially designed electrostatic analyzer at the output of a quadrupole mass filter consisting of four wire electrodes and a grounded shield case. The two diagonal wire electrodes have the same applied voltage and the others have an applied voltage of opposite polarity. The main drawbacks of such a spectrometer are the absence of simultaneous detection of positive and negative ions with different masses which is particularly important for depth profiling and imaging, and the energy separation of secondary ions after quadrupole that leads to a reduction in mass resolution.Previously a quadrupole electrostatic deflector (QD) was successfully used as an energy analyzer in some installations, e.g. for research into photodissociation processes of molecular ions under ion and laser beams interaction, 2 and in the collector system of a quadrupole secondary ion mass spectrometer. 3,4 This paper reports the original design of a simple SIMS setup based on a particular QD configuration that allows simultaneous positive and negative secondary ion detection of different masses by two quadrupole analyzers.
EXPERIMENTALA schematic layout of the secondary ion mass spectrometer is shown in Fig. 1. The unit consists of a newly designed quadrupole electrostatic energy analyzer/deflector (1), an inert gas ion gun model 3M (Kratos Analytical Instruments, Manchester, England) (2), two quadrupole mass analyzers mode...