Definition of the Rational Geometry of the Cable-beam Cover over Stadium Tribunes

Mushchanov, Volodymyr; Protopopov, I.Ya.; Korsun, Olga; Garifullin, Marsel

doi:10.1016/j.proeng.2015.08.209

Cited by 2 publications

(1 citation statement)

References 6 publications

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“…Resonant pressure micro-sensors are featured with quasi-digital outputs, which rely on electrostatic/electromagenetic/electrothermal excitations and capacitive and piezoresistive detections [1]. The electrostatic excitation can be realized easily without the requirement of magnets, and is convenient for integrations while piezoresistive sensing reduces influences from parasitic capacitors and increases the ratios of signal to noise in comparison to capacitive detections [2]. However, previously reported resonant sensors based on electrostatic excitation and piezoresistive detection suffered from complicated structures and fabrication processes due to the limitations in the structure of the piezoresistor [3].…”

Section: Introductionmentioning

confidence: 99%

A Double-Ended Tuning Fork Based Resonant Pressure Micro-Sensor Relying on Electrostatic Excitation and Piezoresistive Detection

Shi

Xie

et al. 2018

Eurosensors 2018

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This study proposes a microfabricated resonant pressure sensor based on electrostatic excitation and low-impedance piezoresistive detection in which a pair of double-ended tuning forks were utilized as resonators for differential outputs. In operations, targeted pressures deforms the pressure-sensitive membrane, resulting in stress variations of two resonators, leading to shifts of the intrinsic resonant frequencies, which were then measured piezoresistively. The developed microfabricated resonant pressure sensor was fabricated using simple SOI-MEMS processes and quantified in both open-loop and closed-loop manners, where the quality factor, differential sensitivity and linear correlation coefficient were quantified as higher than 10,000, 79.4 Hz/kPa and 0.99999, respectively. Compared to previous resonant piezoresistive sensors, the developed device leveraged single-crystal silicon as the piezoresistor, with advantages in simple sensing structures and fabrication steps. Furthermore, the differential setup was adopted in this study which can further improve the performances of the developed sensors.

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Section: Introductionmentioning

confidence: 99%