Defect Reduction of Ge on Si by Selective Epitaxy and Hydrogen Annealing

Yu, Hyun-Yong; Park, Jin-Hong; Okyay, Ali K.; Saraswat, Krishna

doi:10.1149/ma2008-02/37/2466

Meet. Abstr.

2008

DOI: 10.1149/ma2008-02/37/2466

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Defect Reduction of Ge on Si by Selective Epitaxy and Hydrogen Annealing

Hyun-Yong Yu,

Jin-Hong Park,

Ali K. Okyay

et al.

Abstract: not Available.

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Defect Reduction of Ge on Si by Selective Epitaxy and Hydrogen Annealing

Abstract: not Available.

Cited by 0 publications

References 4 publications

No citations

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