Defect-Free Erbium Silicide Formation Using an Ultrathin Ni Interlayer

Abstract

An ultrathin Ni interlayer (∼1 nm) was introduced between a TaN-capped Er film and a Si substrate to prevent the formation of surface defects during thermal Er silicidation. A nickel silicide interfacial layer formed at low temperatures and incurred uniform nucleation and the growth of a subsequently formed erbium silicide film, effectively inhibiting the generation of recessed-type surface defects and improving the surface roughness. As a side effect, the complete transformation of Er to erbium silicide was somewhat delayed, and the electrical contact property at low annealing temperatures was dominated by the nickel silicide phase with a high Schottky barrier height. After high-temperature annealing, the early-formed interfacial layer interacted with the growing erbium silicide, presumably forming an erbium silicide-rich Er-Si-Ni mixture. As a result, the electrical contact property reverted to that of the low-resistive erbium silicide/Si contact case, which warrants a promising source/drain contact application for future high-performance metal-oxide-semiconductor field-effect transistors.

Synthesis of NiO/carbon shell/single-walled carbon nanotube composites as anode materials for lithium ion batteries

“…Zhu and co-workers reported a large-scale synthesis of high-quality ultrathin NiO nanosheets, which exhibited a high reversible lithium storage capacity of 715.2 mA h g À1 at a current density of 200 mA g À1 after 130 cycles [12]. Choi et al used a continuous one-pot method to synthesize yolk-shell and single-crystalline cubic NiO powders, the yolk-shell and single-crystalline cubic NiO powders delivered discharge capacities of 951 and 416 mA h g À1 , respectively, at a high current density of 700 mA g À1 after 150 cycles [13]. Susantyoko et al fabricated NiO on vertically-aligned multi-walled carbon nanotube (MWCNT) arrays and achieved a specific capacity of 864.8 mA h g À1 at the current rate of 143.6 mA g À1 for up to 50 cycles [14].…”

Progress of NiO‐Based Anodes for High‐Performance Li‐Ion Batteries

“…In Kang's study, spray pyrolysis was used to synthesize yolk‐shell NiO particles, and single crystal cubic NiO nanoparticles were prepared by flame pyrolysis [40] . As the anode of LIBs, the prepared yolk‐shell NiO has better rate performance than the single‐crystal cubic NiO.…”

Synthesis and H2S sensing performance of MoO3/Fe2(MoO4)3 yolk/shell nanostructures

“…[18][19][20][21][22][23][24][25][26][27][28][29] As for elemental doping, the doped level and the amount of doped elements in host materials need to be controlled carefully because they had important effects on the sensing properties of MOSs. [30][31][32][33][34] MOS-based yolk-shell nanostructures have recently attracted great attention because they have potential applications in various elds including electrode materials of lithium-ion battery, [35][36][37][38][39] chemical catalysts, 40 magnetic separation, 41,42 and drug delivery etc. [43][44][45] The pore and void space presented in such yolk-shell nanostructures may be in favor of the improvement of their gas sensing performances.…”