2013
DOI: 10.1063/1.4819216
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Defect formation and thermal stability of H in high dose H implanted ZnO

Abstract: Articles you may be interested in Effect of implanted species on thermal evolution of ion-induced defects in ZnOChemical effect of Si+ ions on the implantation-induced defects in ZnO studied by a slow positron beam J. Appl. Phys. 113, 043506 (2013); 10.1063/1.4789010Annealing process of ion-implantation-induced defects in ZnO: Chemical effect of the ion speciesWe studied the structural properties, defect formation, and thermal stability of H in hydrothermally grown ZnO single crystals implanted with Hdose rang… Show more

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Cited by 20 publications
(7 citation statements)
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“…The formation of one-, two-and three-dimensional voids filled with hydrogen during the crystal growth [69] or after proton implantation [70,71] was reported in the literature. Zinc vacancies formed via ion bombardment were found to coalesce into the bubbles filled with hydrogen after annealing at temperatures 200 • C-500 • C [70].…”
Section: F Position In the Latticementioning
confidence: 90%
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“…The formation of one-, two-and three-dimensional voids filled with hydrogen during the crystal growth [69] or after proton implantation [70,71] was reported in the literature. Zinc vacancies formed via ion bombardment were found to coalesce into the bubbles filled with hydrogen after annealing at temperatures 200 • C-500 • C [70].…”
Section: F Position In the Latticementioning
confidence: 90%
“…Further treatments at higher temperatures releases the hydrogen from those traps. It was also shown, that subsequent annealing results in a significant decrease of lattice strain [71]. Recently, zinc vacancy-related defects were shown to be formed after annealing ZnO in oxygen or nitrogen atmosphere above 900 • C [72].…”
Section: F Position In the Latticementioning
confidence: 98%
“…Chan et al . observed a lattices elongating of ZnO along c-axis and stabilization of H by defect complexes, such as H O and/or Li Zn -OH 15 . They also observed a more efficient damage recovery in the samples implanted with higher dose.…”
Section: Introductionmentioning
confidence: 96%
“…Compared with other ion implantation, H ion implantation is still an active topic because H plays a significant role in conductivity of ZnO and it is unavoidably introduced during material growth and processing 6,7 . Most studies concentrate on H ion implantation effects on properties of bulk ZnO crystals 7,1518 . Heinhold et al .…”
Section: Introductionmentioning
confidence: 99%
“…Thus, divacancies may diffuse at relatively low temperatures and form larger vacancy clusters 19 or other complexes17 . Indeed, formation of vacancy clusters in ZnO has been reported in several experimental studies15,16,49 .…”
mentioning
confidence: 91%