Deeply sub-wavelength laser nanopatterning of Si surface in dielectric fluids: Manipulation by surface plasmon resonance

Kudryashov, S. I.; Nastulyavichus, Alena; Сараева, И. Н.; Rudenko, A. A.; Zayarny, D. A.; Ионин, А. А.

doi:10.1016/j.apsusc.2020.146204

Cited by 28 publications

(26 citation statements)

References 32 publications

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“…This calculation fits well with the period range of 400-600 nm experimentally obtained by fs-LA in water and acetone at a close wavelength of 1045 nm, as presented in this work and our previous work [18]. Hence, it can be concluded that the theoretical trend of Λ ∝ 1/n 2 proposed by Kudryashov et al [48] is at least applicable to some cases. Compared to Ta-LIPSSs, W-LIPSSs have been studied much more.…”

Section: Sem Characterization Of Hierarchical Micro/nanostructure Morsupporting

confidence: 92%

“…This means that liquid is beneficial for achieving narrower periods of LIPSSs, a trend that is also confirmed by the summary of the periods of Si-LIPSSs obtained in different environments [15]. Recently, Kudryashov et al proposed that the factors of the squared optical refraction index (n) of environments can be used to estimate the environment-dependent periods (Λ) of LIPSSs following the trend of Λ ∝ 1/n 2 , which indicated that liquids with a higher refraction index than air normally produced smaller LIPSS periods [48]. The refractive indices of air, water, ethanol and acetone are 1, 1.33, 1.36 and 1.36, respectively, which would give ratios of LIPSS periods in air/water/ethanol/acetone (Λ air /Λ water /Λ ethanol /Λ acetone ) of 1/1.33 2 /1.36 2 /1.36 2 .…”

Section: Sem Characterization Of Hierarchical Micro/nanostructure Mormentioning

confidence: 62%

“…This finding is in accordance with our previous report, which showed that USHFLs are not parallel to the direction of light polarization but strongly related to the LSFLs/HSFLs curvatures [ 18 ]. The simultaneous formation of LSFLs/HSFLs may originate from the excitation and interference of counter-propagating surface plasmons with extreme wavenumbers during fs-LAL [ 48 ], while the formation of UHSFLs is attributed to Marangoni bursting during the formation of LSFLs/HSFLs molten layers [ 18 ].…”

Section: Resultsmentioning

confidence: 99%

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Multiscale Hierarchical Micro/Nanostructures Created by Femtosecond Laser Ablation in Liquids for Polarization-Dependent Broadband Antireflection

et al. 2020

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In this work, we present the possibility of producing multiscale hierarchical micro/nanostructures by the femtosecond laser ablation of transition metals (i.e., Ta and W) in water and investigate their polarization-dependent reflectance. The hierarchical micro/nanostructures are composed of microscale-grooved, mountain-like and pit-rich structures decorated with hybrid laser-induced periodic surface structures (LIPSSs). The hybrid LIPSSs consist of low/high and ultrahigh spatial frequency LIPSSs (LSFLs/HSFLs and UHSFLs). LSFLs/HSFLs of 400–600 nm in a period are typically oriented perpendicular to the direction of the laser polarization, while UHSFLs (widths: 10–20 nm and periods: 30–50 nm) are oriented perpendicular to the curvatures of LSFLs/HSFLs. On the microstructures with height gradients, the orientations of LSFLs/HSFLs are misaligned by 18°. On the ablated W metasurface, two kinds of UHSFLs are observed. UHSFLs become parallel nanowires in the deep troughs of LSFLs/HSFLs but result in being very chaotic in shallow LSFLs, turning into polygonal nanonetworks. In contrast, chaotic USFLs are not found on the ablated Ta metasurfaces. With the help of Fourier transform infrared spectroscopy, it is found that microgrooves show an obvious polarization-dependent reflectance at wavelengths of 15 and 17.5 μm associated with the direction of the groove, and the integration of microstructures with LSFs/HSFLs/UHSFLs is thus beneficial for enhancing the light absorbance and light trapping in the near-to-mid-infrared (NIR-MIR) range.

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Section: Sem Characterization Of Hierarchical Micro/nanostructure Morsupporting

confidence: 92%

Section: Sem Characterization Of Hierarchical Micro/nanostructure Mormentioning

confidence: 62%

Section: Resultsmentioning

confidence: 99%

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Multiscale Hierarchical Micro/Nanostructures Created by Femtosecond Laser Ablation in Liquids for Polarization-Dependent Broadband Antireflection

et al. 2020

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“…Several previous studies reported fs-laser ablation of Si wafers in liquid environments (including water, ethanol and acetone), where multiple laser processing parameters such as pulse energy E (fluence, F), pulse repetition κ and scanning rate ν (or number of applied pulses per spot) were shown to affect the resulting surface morphology via multiple physical phenomena proceeding upon liquid-assisted laser ablation [22,[29][30][31][32]. With no loss in generality, to illustrate the key idea of this paper, here we considered Si processing at κ = 1 KHz and ν = 0.5 mm/s (i.e., practically relevant parameters available for majority of commercial fs lasers and nanopositioning/scanning systems), and only the pulse energy E and the lateral interval between laser scanning lines p were adjusted.…”

Section: Femtosecond-laser Liquid-assisted Processing Of Siliconmentioning

confidence: 99%

Direct Femtosecond Laser Fabrication of Chemically Functionalized Ultra-Black Textures on Silicon for Sensing Applications

et al. 2021

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Here, we present the single-step laser-assisted fabrication of anti-reflective hierarchical surface textures on silicon locally functionalized with a photoluminescent (PL) molecular nanolayer. Using femtosecond-laser ablation of commercial crystalline Si wafers placed under a layer of a solution containing rhodamine 6G (R6G) a triethoxysilyl derivative, we fabricated ordered arrays of microconical protrusions with self-organized nanoscale surface morphology. At the same time, the laser-induced temperature increase facilitated surface activation and local binding of the R6G derivative to the as-fabricated nanotextured surface. The produced dual-scale surface textures showed remarkable broadband (visible to near-IR) light-absorbing properties with an averaged reflectivity of around 1%, and the capping molecular nanolayer demonstrated a strongly enhanced PL yield. By performing a pH sensing test using the produced nanotextured substrate, we confirmed the retention of sensory properties of the molecules attached to the surface and validated the potential applicability of the high-performing liquid-assisted laser processing as a key technology for the development of innovative multifunctional sensing devices in which the textured substrate (e.g., ultra-black semiconductor) plays a dual role as a support and PL signal amplifier.

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“…Расчеты показали, что с ростом плотности электрондырочной плазмы поверхностный плазмонный резо- нанс двигается вверх по энергии кванта и для длины волны 1030 nm достигается при плотности плазмы менее 4 • 10 21 cm −3 , а волновое число существенно демпфированных плазмонов [20] составляет при этом K ≤ 1.5 µm −1 (рис. 3).…”

Section: экспериментальная частьunclassified

Формирование И Оптические Свойства Нанорешеток На Поверхности Фторида Кальция, Генерируемых При Фемтосекундном Лазерном Воздействии

Rupasov¹,

Данилов²,

Ионин³

et al. 2021

Оптика И Спектроскопия

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Femtosecond laser structuring of dielectrics is an urgent problem for the creation of optical elements. In this work, we performed femtosecond laser nanostructuring of the calcium fluoride surface with the formation of self-organizing periodic gratings with subwavelength periods of the order of 200 and 350 nm. During the work, the dependence of the period of the structures on the wavelength of laser radiation was established, which was confirmed by the simulation results. The structures show a decrease in transmission over the entire visible range, predominantly due to diffraction and light scattering. Keywords: direct laser recording, femtosecond laser pulses, surface functional nano- and micro-optical structures, diffraction.

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Deeply sub-wavelength laser nanopatterning of Si surface in dielectric fluids: Manipulation by surface plasmon resonance

Cited by 28 publications

References 32 publications

Multiscale Hierarchical Micro/Nanostructures Created by Femtosecond Laser Ablation in Liquids for Polarization-Dependent Broadband Antireflection

Multiscale Hierarchical Micro/Nanostructures Created by Femtosecond Laser Ablation in Liquids for Polarization-Dependent Broadband Antireflection

Direct Femtosecond Laser Fabrication of Chemically Functionalized Ultra-Black Textures on Silicon for Sensing Applications

Формирование И Оптические Свойства Нанорешеток На Поверхности Фторида Кальция, Генерируемых При Фемтосекундном Лазерном Воздействии

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