Deep X-ray mask with integrated electro-thermal micro xy-stage for 3D fabrication

Lee, Kwang-Cheol; Lee, Seung S.

doi:10.1016/j.sna.2003.10.008

Cited by 11 publications

(7 citation statements)

References 17 publications

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“…Thermal evaporation is one of the simplest physical vapor deposition (PVD) techniques in a vacuum environment. Microgrippers are prepared particularly using MEMS/NEMS . In this study, this method was used to coat the surfaces of the specimens.…”

Section: Introductionmentioning

confidence: 99%

Comparison of the adhesion forces in single and double‐layer coatings on the MEMS surfaces by JKR and DMT models

Joulaei

Kolahdoozan

Salehi

et al. 2019

Surface & Interface Analysis

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In many medical and industrial applications, some strategies are needed to control the adhesion forces between the materials, because surface forces can activate or hinder the function of the device. All actual surfaces present some levels of roughness and the contact between two surfaces is transferred by the asperities on the surfaces.The force of the adhesion, which depends on the operating situations, can be influenced by the contact region. The aim of the present study is to predict the adhesion force in MEMS surfaces using the JKR and DMT models. The surfaces of the coating material in this research consisted of the single-layer coating of Gold and Silver, and the double-layer coating of TiO 2 /Gold and TiO 2 /Silver on the silicon (100) substrates.The depositing was done by the thermal evaporation method. The results showed that the double-layer coating developed by the new deposition method helped the reduction of the adhesion forces between the probe tip and the specimen surface.The predicted adhesion forces between the probe and the specimens with DMT and JKR models were compared with the experimental results. For all specimens, the simulated data by applying the JKR theory were in a good agreement with the adhesion force experimental values.

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Section: Introductionmentioning

confidence: 99%

Comparison of the adhesion forces in single and double‐layer coatings on the MEMS surfaces by JKR and DMT models

Joulaei

Kolahdoozan

Salehi

et al. 2019

Surface & Interface Analysis

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“…Controllable parameters in this process are the pressure of the chamber and the temperature of the filament boat. This method of deposition is one of the most common types of coating in thin film layers …”

Section: Materials and Experimental Proceduresmentioning

confidence: 99%

“…The specimens' deposition was performed by using the thermal evaporation method on the surface. It is a gas method of phase deposition with many uses in the MEMS/NEMS, particularly for microfabrication . With this method, the thin layer of coating is monotonous and shows the best adhesion on the substrate and high quality, without the need for the plasma environment …”

Section: Introductionmentioning

confidence: 99%

Experimental investigation of the adhesion force of single and double‐layer coatings on MEMS surfaces

Joulaei

Kolahdoozan

Salehi

et al. 2018

Surface & Interface Analysis

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Adhesion force is one of the most important factors in microelectromechanical systems (MEMS), especially for microassembly. It depends on operating conditions and is affected by the contact area. In this study, the adhesion force between MEMS materials and AFM tips was analysed using AFM's point-mode spectroscopy. The aim was to study the effectiveness of various coatings in MEMS adhesion surfaces.For this purpose, five silicon surfaces were used, four of which were coated, and one was noncoated. Two of them were deposited by single-layer coating (Au and Ag). The other two were deposited by double-layer coating (TiO 2 /Au, TiO 2 /Ag) on a Si (1 0 0) substrate. The depositing was accomplished by the thermal evaporation method. Composite materials and analysis were reviewed by observing the SEM image. The experimental results showed that the method of deposition helped to decrease the adhesion force between the probe tip and the surface of the specimens, and double-layer coating had stronger effect on decreasing the adhesion force than the single-layer coating.

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“…Many studies have considered “pain as the fifth vital sign” due to the importance of pain management and patients’ comfort and convenience (1–4). Although pain is one of the most treatable disease symptoms, its relief/reduction is still considered as one of the greatest failures of modern medicine (5).…”

Section: Introductionmentioning

confidence: 99%

The Effect of Extended Injection of Subcutaneous Heparin on Pain Intensity and Bruising Incidence

Ahmadi

Saadati

et al. 2016

Electron physician

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BackgroundReducing patients’ pain is one of the main goals of providing clinical services, which requires nursing skill. As a simple technique, increasing the duration of subcutaneous heparin injection may affect the intensity of pain and bruising.ObjectiveThe aim of this study was to assess the effect of increasing the heparin injection time on pain intensity and bruising associated with subcutaneous injection.MethodsThe present quasi-experimental study consisted of 86 patients, admitted to our hospital, who were treated with subcutaneous heparin injection. A McGill pain intensity questionnaire was used to measure pain severity in a purposive sampling. All of the subjects received subcutaneous heparin twice for 10 seconds. They also were injected twice with heparin infusion, although it was for 30 seconds this time. The interval between the two injections was 24 h, and the intensity of the pain was measured after each injection. The Pearson correlation coefficient was measured, and analysis of variance (ANOVA) and the t-test were used to analyze the data.ResultsEighty patients received heparin. The body mass indexes were reported as 52 (60%) and 34 (40%) for subjects within the age range of 18.5–24.9 and 25–29.9, respectively. Regarding the mean of pain intensity, there was a significant difference between the 10 and 30 s injections (p < 0.05). Additionally, there was a significant difference in bruising rates between the two methods 48 and 72 h after injection (p < 0.05). The ANOVA test showed a significant association between gender and bruising (p = 0.001).ConclusionAccording to the results, by elevating the duration of heparin injection, the severity of pain was reduced, and, therefore, the patients felt more comfortable.Trial RegistrationThe trial was registered at the Thai Clinical Trials Registry (TCTR) with the TCTR identification of TCTR20160221001.FundingThis research was supported by the research cluster grant (88186-25/01/89) from Mashhad University of Medical Sciences, Mashhad, Iran. The authors received no financial support for the authorship and/or publication of this article.

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Deep X-ray mask with integrated electro-thermal micro xy-stage for 3D fabrication

Cited by 11 publications

References 17 publications

Comparison of the adhesion forces in single and double‐layer coatings on the MEMS surfaces by JKR and DMT models

Comparison of the adhesion forces in single and double‐layer coatings on the MEMS surfaces by JKR and DMT models

Experimental investigation of the adhesion force of single and double‐layer coatings on MEMS surfaces

The Effect of Extended Injection of Subcutaneous Heparin on Pain Intensity and Bruising Incidence

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