Deep-UV laser direct writing of photoluminescent ZnO submicron patterns: an example of nanoarchitectonics concept

Abstract

Micro- and nanopatterning of metal oxide materials is an important process to develop electronic or optoelectronic devices. ZnO is a material of choice for its semiconducting and photoluminescence properties. In the frame of the nanoarchitectonics concept, we have developed and investigated a new process that relies on direct writing laser patterning in the Deep-UV (DUV) range to prepare photoluminescent microstructures of ZnO at room temperature, under air. This process is based on a synthesis of colloidal ZnO nanocrystals (NCs) with a careful choice of the ligands on the surface to obtain an optimal (i) stability of the colloids, (ii) redissolution of the non-insolated parts and (iii) cross-linking of the DUV-insolated parts. The mechanisms of photocrosslinking are studied by different spectroscopic methods. This room temperature process preserves the photoluminescence properties of the NCs and the wavelength used in DUV allows to reach a sub-micrometer resolution, which opens new perspectives for the integration of microstructures on flexible substrates for optoelectronic applications.

Laser Direct Writing of Crystallized TiO2 by Photothermal Effect Induced by Gold Nanoparticles

“…[15,16] Direct writing laser patterning of photoluminescent ZnO can also be achieved by DUV exposure. [17] Recently, near-infrared condensation of indium zinc oxide (IZO) has also been performed to design an H 2 S sensor. [5] Near-infrared (NIR) condensation with an NIR dye added to the solution was found to be effective in converting the xerogel into a metal oxide thin film.…”

Droplet dynamics affecting the shape of patterns formed spontaneously by transforming UV-curable emulsions

“…In general, even with a photoresist, it is often observed that pattern height differences decrease owing to overexposure, as in ET fog. The main reason why layers remain in the unexposed areas after overexposure is often light leakage 48 , 49 . A major cause of ET fog is also light leakage to the unexposed areas.…”

Materials Nanoarchitectonics for Advanced Physics Research

“…Reproduced under terms of the CC‐BY license. [ 70 ] Copyright 2022, Quentin Kirscher, Samar Hajjar‐Garreau, Fabien Grasset, Dominique Berling, and Olivier Soppera, published by Taylor & Francis.…”

“…Kirscher et al have, under the concept of nanoarchitectonics, developed a new process that relies on direct-write laser patterning in the deep UV region developed. [70] The process is based on the fabrication of photoluminescent microstructures by patterning ZnO under room temperature and atmospheric conditions (Figure 7). This is caused by the aggregation and insolubility of the ZnO nanocrystals.…”

“…Direct-write laser ZnO patterning in the deep UV region under room temperature and atmospheric conditions through the aggregation and insolubility of the ZnO nanocrystals. Reproduced under terms of the CC-BY license [70]. Copyright 2022, Quentin Kirscher, Samar Hajjar-Garreau, Fabien Grasset, Dominique Berling, and Olivier Soppera, published by Taylor & Francis.…”