Deep Trench Isolation for Pixel Crosstalk Suppression in Active Pixel Sensor with 1.7μm pixel pitch

Park, Byung Jun; Moon, Cheol; Lee, Young Woo; Kim, Dae Woong; Paik, Kee Hyun; Yoo, Jong Rycol; Yoo, Young Sub; Jon, Yeol; Koo, Chang Hyo; Bang, Suk Chul; Lee, Yum Ki; Cho, Young Joon; Hwang, Sung Ho; Park, Doo Cheol; Jung, Hee Geun; Shin, Jong Cheol; Jung, Jongwan; Lee, Kang Bok; Noh, Hyun Pil; Lee, Duck‐Hyung; Kim, Kinam

doi:10.7567/ssdm.2006.b-9-2

Extended Abstracts of the 2006 International Conference on Solid State Devices and Materials 2006

DOI: 10.7567/ssdm.2006.b-9-2

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Deep Trench Isolation for Pixel Crosstalk Suppression in Active Pixel Sensor with 1.7μm pixel pitch

Byung Jun Park¹,

Cheol Moon²,

Young Woo Lee³

et al.

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Deep Trench Isolation for Pixel Crosstalk Suppression in Active Pixel Sensor with 1.7μm pixel pitch

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