Deep reactive ion etching of silica for planar lightwave circuits using indigenously developed ECR/RIE system

Pachauri, J. P.; Baby, Aji; Chaturvedi, Nidhi; Kothari, H. S.; Singh, Awatar; Singh, Bhawna; Dixit, P. N.; Bhattacharya, R.

doi:10.1117/12.441305

Photonics 2000: International Conference on Fiber Optics and Photonics 2001

DOI: 10.1117/12.441305

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Deep reactive ion etching of silica for planar lightwave circuits using indigenously developed ECR/RIE system

J. P. Pachauri

Aji Baby

Nidhi Chaturvedi

et al.

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Deep reactive ion etching of silica for planar lightwave circuits using indigenously developed ECR/RIE system

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