Deep micro-machining of poly-ethylene terephthalate for plastic MEMS applications

Pajouhi, H.; Mohajerzadeh, S.; Nayeri, Fatemeh Dehghan; Sanaee, Zeinab

doi:10.1016/j.sse.2010.07.020

Cited by 3 publications

(2 citation statements)

References 15 publications

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“…Then, they have been machined in Ertalyte PET due to the dimensional stability, excellent wear resistance, and low coefficient of friction that offers. These properties make this material extremely suitable for the machining of high-precision parts ( 30 ). In addition, the designs can easily be transferred to injection molding technology.…”

Section: Methodsmentioning

confidence: 99%

Critical Study on the Tube-to-Chip Luer Slip Connectors

Etxeberria¹,

Aguilera²,

Madinabeitia³

et al. 2022

Front. Med. Technol.

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Luer slip is one of the gold standards for chip-to-world interface in microfluidics. They have outstanding mechanical and operational robustness in a broad range of applications using water and solvent-based liquids. Still, their main drawbacks are related to their size: they have relatively large dead volumes and require a significant footprint to assure a leak-free performance. Such aspects make their integration in systems with high microchannel density challenging. To date, there has been no geometrical optimization of the Luer slips to provide a solution to the mentioned drawbacks. This work aims to provide the rules toward downscaling the Luer slips. To this effect, seven variations of the Luer slip male connectors and five variations of Luer slip female connectors have been designed and manufactured focusing on the reduction of the size of connectors and minimization of the dead volumes. In all cases, female connectors have been developed to pair with the corresponding male connector. Characterization has been performed with a tailor-made test bench in which the closure force between male and female connectors has been varied between 7.9 and 55 N. For each applied closure force, the test bench allows liquid pressures to be tested between 0.5 and 2.0 bar. Finally, the analysis of a useful life determines the number of cycles that the connectors can withstand before leakage.

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Section: Methodsmentioning

confidence: 99%

Critical Study on the Tube-to-Chip Luer Slip Connectors

Etxeberria¹,

Aguilera²,

Madinabeitia³

et al. 2022

Front. Med. Technol.

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show abstract

“…PET is introduced as a biocompatible, transparent polymer utilized for such an application for the first time (to our knowledge). PET has been utilized in plastic MEMS, chemiresistors, supercapacitors, and implantable bioelectronic interfaces [ 30 , 31 , 32 , 33 ] but not in vitro biosensor arrays such as MEAs. Similarly, PEN is a common substrate that has been utilized for applications such as flexible displays [ 34 , 35 ], energy storage capacitors [ 36 ], organic light-emitting diodes [ 37 ], solar cells [ 38 ] and other flexible electronics applications [ 39 ] but to date not for the fabrication of biosensor MEAs.…”

Section: Introductionmentioning

confidence: 99%

Micromachining on and of Transparent Polymers for Patterning Electrodes and Growing Electrically Active Cells for Biosensor Applications

et al. 2017

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We report on microfabrication and assembly process development on transparent, biocompatible polymers for patterning electrodes and growing electrically active cells for in vitro cell-based biosensor applications. Such biosensors are typically fabricated on silicon or glass wafers with traditional microelectronic processes that can be cost-prohibitive without imparting necessary biological traits on the devices, such as transparency and compatibility for the measurement of electrical activity of electrogenic cells and other biological functions. We have developed and optimized several methods that utilize traditional micromachining and non-traditional approaches such as printed circuit board (PCB) processing for fabrication of electrodes and growing cells on the transparent polymers polyethylene naphthalate (PEN) and polyethylene terephthalate (PET). PEN-based biosensors are fabricated utilizing lithography, metal lift-off, electroplating, wire bonding, inkjet printing, conformal polymer deposition and laser micromachining, while PET-based biosensors are fabricated utilizing post-processing technologies on modified PCBs. The PEN-based biosensors demonstrate 85–100% yield of microelectrodes, and 1-kHz impedance of 59.6 kOhms in a manner comparable to other traditional approaches, with excellent biofunctionality established with an ATP assay. Additional process characterization of the microelectrodes depicts expected metal integrity and trace widths and thicknesses. PET-based biosensors are optimized for a membrane bow of 6.9 to 15.75 µm and 92% electrode yield on a large area. Additional qualitative optical assay for biomaterial recognition with transmitted light microscopy and growth of rat cortical cells for 7 days in vitro (DIV) targeted at biological functionalities such as electrophysiology measurements are demonstrated in this paper.

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Fabrication of the array chlorine ion sensor based on microfluidic device framework

Chou

et al. 2012

Solid-State Electronics

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Deep micro-machining of poly-ethylene terephthalate for plastic MEMS applications

Cited by 3 publications

References 15 publications

Critical Study on the Tube-to-Chip Luer Slip Connectors

Critical Study on the Tube-to-Chip Luer Slip Connectors

Micromachining on and of Transparent Polymers for Patterning Electrodes and Growing Electrically Active Cells for Biosensor Applications

Fabrication of the array chlorine ion sensor based on microfluidic device framework

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