2013
DOI: 10.1016/j.snb.2013.01.032
|View full text |Cite
|
Sign up to set email alerts
|

Deep-brain silicon multielectrodes for simultaneous in vivo neural recording and drug delivery

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
3
2

Citation Types

3
59
0

Year Published

2016
2016
2020
2020

Publication Types

Select...
6

Relationship

1
5

Authors

Journals

citations
Cited by 67 publications
(62 citation statements)
references
References 35 publications
3
59
0
Order By: Relevance
“…The fabrication process can be found in details in [15,20]. First, the buried microchannel is fabricated then the functional layers and the probe shaft were micromachined.…”
Section: Design and Fabrication Of The Microfluidic Channel And The Micmentioning
confidence: 99%
See 4 more Smart Citations
“…The fabrication process can be found in details in [15,20]. First, the buried microchannel is fabricated then the functional layers and the probe shaft were micromachined.…”
Section: Design and Fabrication Of The Microfluidic Channel And The Micmentioning
confidence: 99%
“…Masking layer was standard photoresist on the front side, while the etch stop layers were electron beam evaporated Al film and subsequently spin-coated photoresist. The fabrication process can be found in more details in [15,20].…”
Section: Design and Fabrication Of The Microfluidic Channel And The Micmentioning
confidence: 99%
See 3 more Smart Citations