Abstract:Surface particle defects smaller than the minimum detection limit (MDL) of particle detection metrology, may, after a thin-film deposition step, get decorated and become larger than the MDL. Chip manufacturers may therefore incorrectly identify the thin-film deposition step as the defect creation step and allocate resources incorrectly. The effect of thin film deposition on pre-existing poly-styrene latex (PSL) spheres on the wafer surface was studied. Results show that both the physical size and scattering cr… Show more
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