Cleo: 2014 2014
DOI: 10.1364/cleo_at.2014.ath4p.5
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Decontamination of Medical Device Surface Using Ultrashort Pulsed Laser Irradiation

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“…Optical methods are more often used due to their higher speed. The main optical methods are: profilometry, interferometry, atomic force microscopy, method of optical correlation, microwave [7] and laser speckle methods [5,8]. Some of optical methods are suitable for inspection of the smallest silicon components of micro-electro-mechanical systems [9].…”
Section: Introductionmentioning
confidence: 99%
“…Optical methods are more often used due to their higher speed. The main optical methods are: profilometry, interferometry, atomic force microscopy, method of optical correlation, microwave [7] and laser speckle methods [5,8]. Some of optical methods are suitable for inspection of the smallest silicon components of micro-electro-mechanical systems [9].…”
Section: Introductionmentioning
confidence: 99%