N 2 O removal was investigated in N 2 or air using 172 nm Xe 2 excimer lamps (50 or 300 mW/cm 2 ) without using any expensive catalysts. The residual amount of N 2 O and the formation ratios of products were measured as functions of photoirradiation time, N 2 O concentration, and O 2 concentration. N 2 O (100 ppm) was completely converted to N 2 and O 2 without NO x emission in N 2 at atmospheric pressure after 30 min photoirradiation using a high-power Xe 2 excimer lamp (300 mW/cm 2 ). 76% of N 2 O (100 ppm) was also converted to N 2 , O 2 , and HNO 3 in air (20% O 2 ) after 30 min photoirradiation using the high-power lamp. We concluded that N 2 O is dominantly decomposed by 172 nm photolysis in N 2 and by the O( 1 D) þ N 2 O reaction in air, where O( 1 D) atoms dominantly arise from the 172 nm photolysis of O 2 . The conversion of N 2 O in air increased more than twofold by decreasing the total pressure from atmospheric pressure to 20 kPa by suppressing the collisional quenching of O( 1 D) by N 2 and O 2 buffer gases. In a flow experiment, the conversion of N 2 O in N 2 was only 6 -18% in the total flow rate range of 0.1-1 L/min owing to the short residence time of N 2 O in the photolysis chamber.