1998
DOI: 10.1016/s0304-3894(98)00182-4
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Decomposition of methyl chloride by using an RF plasma reactor

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Cited by 24 publications
(25 citation statements)
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“…Moreover, at higher φ values, higher CH 3 Cl feeding concentrations, and higher input power wattages, more soot formation and polymerization were also found in the plasma reactor. These resulted in a lower carbon balance in the effluent gas stream (Hsieh et al, 1998b). Both methyl chloride decomposition efficiency and fraction of total-carbon input converted into CO and CO 2 were decreased by increasing the methyl chloride feeding concentration.…”
Section: (4) Decomposition Of Ethylene Oxide In the Rf Plasma Environmentioning
confidence: 99%
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“…Moreover, at higher φ values, higher CH 3 Cl feeding concentrations, and higher input power wattages, more soot formation and polymerization were also found in the plasma reactor. These resulted in a lower carbon balance in the effluent gas stream (Hsieh et al, 1998b). Both methyl chloride decomposition efficiency and fraction of total-carbon input converted into CO and CO 2 were decreased by increasing the methyl chloride feeding concentration.…”
Section: (4) Decomposition Of Ethylene Oxide In the Rf Plasma Environmentioning
confidence: 99%
“…• Hsieh et al (1998b). Hsieh et al (1998b) concluded that in the CH 3 Cl/O 2 /Ar plasma, the decomposition fraction of CH 3 Cl was over 99.99%, which occurred around 440°C in the condition designed for 3% of CH 3 Cl feeding concentration, 1.0 of equivalence ratio (φ), 20 Torr of operation pressure, 100 sccm of total gas flow rate and 100 watts of input power wattage.…”
Section: (4) Decomposition Of Ethylene Oxide In the Rf Plasma Environmentioning
confidence: 99%
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“…In this case, air direct current plasma torches are most often used [2]. In addition, the processing of waste by nonequilibrium plasma is investigated: gliding discharge [3], DBD [4], RF plasma [5]. Particular interest is plasma processing with steam, which leads to the decomposition of complex heteroatomic organic substances (e.g., chlorinated) with the formation of an appropriate hydride (e.g., hydrogen chloride) [6].…”
Section: Introductionmentioning
confidence: 99%