Decision Tree-Supported Analysis of Gallium Arsenide Growth Using the LEC Method
Xia Tang,
Gagan Kumar Chappa,
Lucas Vieira
et al.
Abstract:In this study, an axisymmetric Czochralski furnace model for the LEC growth of gallium arsenide is presented. We produced 88 datasets through computational fluid dynamics simulations. Among the many parameters that affect crystal growth, a total of 13 input parameters were selected, including the geometry and material parameters of the hot zone (crucible, heaters, radiation shield, and crystal), as well as the process parameters (such as pulling and rotation rates, heating power, etc.). Voronkov criteria (v/Gn… Show more
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