Deceleration Cylindrical Electrostatic Lens Using the Charge Density Method

Abstract

With the aid of the integrated charge density method, Laplace’s equation is solved to calculate the axial potential distribution of the electrostatic immersion lens consisting of equi-diameter cylindrical electrodes separated by a specified distance. The potential and electric fields can be calculated directly outside the poles by the charge density on the poles. The solution is obtained by solving the integral equation using the bisection method. The optical properties of the decelerating lens determined under finite, zero and infinite magnification mode with no space-charging effects.