1988
DOI: 10.1143/jjap.27.663
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Decarbonization by Using ECR Plasma

Abstract: Decarbonization rates were measured by the use of ECR plasmas of H2 or O2. The rates are 2.0×1016 m-2s-1 for H2 and 2.4×1018 m-2s-1 for O2 at the same pressure of 1.6×10-2 Pa. The rate for O2 is two orders of magnitude higher than that for H2. These results are analyzed depending on the equilibrium theory and the processing of decarbonization can be explained.

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Cited by 1 publication
(2 citation statements)
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“…Nevertheless, we tested for any contribution of epicuticular wax to the wing membrane reflectance. We manually removed the scales by softly brushing a transparent wing region with a paintbrush (electronic supplementary material, figure S3), followed by plasma cleaning to remove surface hydrocarbons (electronic supplementary material, figure S4) [ 30 ]. Then, we measured the reflectance of the treated wing membrane.…”
Section: Resultsmentioning
confidence: 99%
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“…Nevertheless, we tested for any contribution of epicuticular wax to the wing membrane reflectance. We manually removed the scales by softly brushing a transparent wing region with a paintbrush (electronic supplementary material, figure S3), followed by plasma cleaning to remove surface hydrocarbons (electronic supplementary material, figure S4) [ 30 ]. Then, we measured the reflectance of the treated wing membrane.…”
Section: Resultsmentioning
confidence: 99%
“…To remove surface hydrocarbons, we cut the wing into small pieces, manually removed the scales from the transparent region, and placed them in a plasma cleaner. Ultraviolet light generated in the plasma breaks most organic bonds of hydrocarbons [ 30 ]. Moreover, the radical oxygen species generated react with the broken-down organic contaminants to form mainly water and carbon dioxide that are continuously removed from the chamber.…”
Section: Methodsmentioning
confidence: 99%