Volume 13: Nano-Manufacturing Technology; And Micro and Nano Systems, Parts a and B 2008
DOI: 10.1115/imece2008-66672
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Dealing With Uncertainty of Micro Gears: Integration of Dimensional Measurement, Virtual and Physical Testing

Abstract: Design and quality assurance of micro gear wheels and involute gear wheels involve multiple challenges regarding prediction of functionality and life cycle performance of complex and wear-resistant micromechanical systems. First of all, this is due to the fact that up to now no tolerance system for micro dimension has been defined. In second place, most measurement strategies for the dimensional characterization of involute micro gears cannot be brought forward from the macro world just as they are. There is f… Show more

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“…However, temperature stability of the microscaled sample is not as critical as in the macroscopic case. For example, Albers et al [28] state tolerances of ±5 µm for microgears "on all their relevant features, corresponding to about 10 % of their nominal measures". In comparison, a temperature shift of 1 K leads to a negligible length expansion of 1 nm (100 µm initial length, steel with an expansion coefficient of = 10 ⋅ 10 −6 K −1 ).…”
Section: Influence On the Workpiecementioning
confidence: 99%
“…However, temperature stability of the microscaled sample is not as critical as in the macroscopic case. For example, Albers et al [28] state tolerances of ±5 µm for microgears "on all their relevant features, corresponding to about 10 % of their nominal measures". In comparison, a temperature shift of 1 K leads to a negligible length expansion of 1 nm (100 µm initial length, steel with an expansion coefficient of = 10 ⋅ 10 −6 K −1 ).…”
Section: Influence On the Workpiecementioning
confidence: 99%
“…A micro gear is one of important components of a micro machine or instrument [1][2][3]. Due to its small module, small size,and high precision, it is very difficult to accurately measure them [4][5]. Function oriented tests like the single-flank and the double-flank gear tests are often not applicable on micro gears because calibrated reference gears with very small modules are not available [6].…”
Section: Introductionmentioning
confidence: 99%