De-embedding of On-Chip Inductor at Millimeter-Wave Range

Abstract

A full matrix calculation based de-embedding methodology for on-chip inductor de-embedding at millimeter-wave range is presented. In this method, all extrinsic elements are subtracted by frequency-independent method. The influence of coupling effects between interconnections which has significant impacts on self-resonance frequency of inductor is subtracted by a new dummy structure. A comparison of different de-embedding methods of millimeter-wave on-chip inductors is performed up to 110 GHz. As compared with common methods, the result shows that the proposed method has good accuracy at high frequency and suitable for millimeter-wave inductor modeling and circuit design.