DC and RF Breakdown in Microscale Gaps From Near Vacuum to Atmospheric Pressures

Moore, Chris H.; Ruyack, Alexander; Jordan, Matthew B.; Hummel, Gwendolyn; Schiess, Adrian; Nordquist, Christopher

doi:10.1109/icops45751.2022.9813250

2022 IEEE International Conference on Plasma Science (ICOPS) 2022

DOI: 10.1109/icops45751.2022.9813250

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DC and RF Breakdown in Microscale Gaps From Near Vacuum to Atmospheric Pressures

Chris H. Moore

Alexander Ruyack

Matthew B. Jordan

et al.

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DC and RF Breakdown in Microscale Gaps From Near Vacuum to Atmospheric Pressures

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