Dataset of the Optimization of a Low Power Chemoresistive Gas Sensor: Predictive Thermal Modelling and Mechanical Failure Analysis

Gaiardo, Andrea; Novel, David; Scattolo, Elia; Bucciarelli, Alessio; Bellutti, P.; Pepponi, G.

doi:10.3390/data6030030

Cited by 3 publications

(3 citation statements)

References 29 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…During the impact test, the probe was optically aligned with the centre of each sensor. This calibration was in a quasi-static regime [49] with a test velocity of 1.5 mm/s. The head was placed at a defined distance from the device.…”

Section: B Calibration Of Piezoelectric Tactile Sensorsmentioning

confidence: 99%

Fabrication, Characterization, and Signal Processing Optimization of Flexible and Wearable Piezoelectric Tactile Sensors

et al. 2023

View full text Add to dashboard Cite

Piezoelectric microelectromechanical systems (MEMS) meet the growing demand for sensors with small sizes and low power consumption. For tactile applications and pressure measurements, they are applied in various fields from robotics to healthcare. In this context, flexible devices are very important for their high responsivity and ability to conform to the analyzed surface. This work reports on miniaturized flexible and compliant piezoelectric devices to increase the number of integrable sensors for detecting and discriminating localized pressures and contacts per unit area with minimal crosstalk. For this purpose, a series of Aluminium Nitride-based (AlN) piezoelectric sensors with different diameters (from 5 μm to 500 μm) was realized and the generated electrical signal by sensor deformation was amplified by a differential voltage amplifier circuit. By the analysis of the shape of the piezoelectric signal as a function of the applied pressure, oscillations due to piezoelectric deformations, superimposed on the initial peak signal corresponding to the touch event, have been observed. The integral of the electrical signal was calculated for the most accurate representation to describe the sensor's response. The best responsivity was obtained in samples with diameters of 200 μm and 500 μm. Furthermore, it was also found that the minimum distance between the edges of closed sensors, observing crosstalk below -20 dB, was around 500 μm.

show abstract

Section: B Calibration Of Piezoelectric Tactile Sensorsmentioning

confidence: 99%

Fabrication, Characterization, and Signal Processing Optimization of Flexible and Wearable Piezoelectric Tactile Sensors

et al. 2023

View full text Add to dashboard Cite

show abstract

“…The key factor for hotplates is the control and measurement of the operating temperature at different input voltages. Due to the sub-micron size dimensions, it is unlikely that the temperature can be measured using conventional thermometric tools, such as thermal imaging cameras or infrared detectors [34,35]. To overcome this problem, Pt is chosen for its excellent chemical stability and ideal temperature coefficient of resistance (TCR).…”

Section: Heater and Electrode Materials Selectionmentioning

confidence: 99%

Nano Hotplate Fabrication for Metal Oxide-Based Gas Sensors by Combining Electron Beam and Focused Ion Beam Lithography

Feng,

Giubertoni,

Cian

et al. 2023

Micromachines

Self Cite

View full text Add to dashboard Cite

Metal oxide semiconductor (MOS) gas sensors are widely used for gas detection. Typically, the hotplate element is the key component in MOS gas sensors which provide a proper and tunable operation temperature. However, the low power efficiency of the standard hotplates greatly limits the portable application of MOS gas sensors. The miniaturization of the hotplate geometry is one of the most effective methods used to reduce its power consumption. In this work, a new method is presented, combining electron beam lithography (EBL) and focused ion beam (FIB) technologies to obtain low power consumption. EBL is used to define the low-resolution section of the electrode, and FIB technology is utilized to pattern the high-resolution part. Different Au++ ion fluences in FIBs are tested in different milling strategies. The resulting devices are characterized by scanning electron microscopy (SEM), atomic force microscopy (AFM), and secondary ion mass spectrometry (SIMS). Furthermore, the electrical resistance of the hotplate is measured at different voltages, and the operational temperature is calculated based on the Pt temperature coefficient of resistance value. In addition, the thermal heater and electrical stability is studied at different temperatures for 110 h. Finally, the implementation of the fabricated hotplate in ZnO gas sensors is investigated using ethanol at 250 °C.

show abstract

“…Silicon-based photodetectors are a well-established and commonly utilized technology due to their convenient manufacturing cost, their high efficiency, and their process compatibility with the complementary metal–oxide–semiconductor (CMOS) process. Recently, they have also been employed for near-infrared (NIR) light detection, due to the growing interest towards emerging applications such as quantum distribution key [ 1 ], gas sensing [ 2 , 3 ], time-correlated single photon counting [ 4 , 5 ] and light detection and ranging (LiDAR) for autonomous driving [ 6 ]. Usually, in the majority of these applications, a NIR laser is used as a light source to illuminate the surrounding environment, with a characteristic wavelength in the range (900–1000) nm, which is chosen based on some constraints like human safety and the sun’s background light filtration.…”

Section: Introductionmentioning

confidence: 99%

Near Infrared Efficiency Enhancement of Silicon Photodiodes by Integration of Metal Nanostructures Supporting Surface Plasmon Polaritrons

Scattolo

Cian

Petti

et al. 2023

Sensors

Self Cite

View full text Add to dashboard Cite

Recent years have witnessed a growing interest in detectors capable of detecting single photons in the near-infrared (NIR), mainly due to the emergence of new applications such as light detection and ranging (LiDAR) for, e.g., autonomous driving. A silicon single-photon avalanche diode is surely one of the most interesting and available technologies, although it yields a low efficiency due to the low absorption coefficient of Si in the NIR. Here, we aim at overcoming this limitation through the integration of complementary metal–oxide–semiconductor (CMOS) -compatible nanostructures on silicon photodetectors. Specifically, we utilize silver grating arrays supporting surface plasmons polaritons (SPPs) to superficially confine the incoming NIR photons and therefore to increase the probability of photons generating an electron-hole pair. First, the plasmonic silver array is geometrically designed using time domain simulation software to achieve maximum detector performance at 950 nm. Then, a plasmonic silver array characterized by a pitch of 535 nm, a dot width of 428 nm, and a metal thickness of 110 nm is integrated by means of the focused ion beam technique on the detector. Finally, the integrated detector is electro-optically characterized, demonstrating a QE of 13% at 950 nm, 2.2 times higher than the reference. This result suggests the realization of a silicon device capable of detecting single NIR photons, at a low cost and with compatibility with standard CMOS technology platforms.

show abstract

Dataset of the Optimization of a Low Power Chemoresistive Gas Sensor: Predictive Thermal Modelling and Mechanical Failure Analysis

Cited by 3 publications

References 29 publications

Fabrication, Characterization, and Signal Processing Optimization of Flexible and Wearable Piezoelectric Tactile Sensors

Fabrication, Characterization, and Signal Processing Optimization of Flexible and Wearable Piezoelectric Tactile Sensors

Nano Hotplate Fabrication for Metal Oxide-Based Gas Sensors by Combining Electron Beam and Focused Ion Beam Lithography

Near Infrared Efficiency Enhancement of Silicon Photodiodes by Integration of Metal Nanostructures Supporting Surface Plasmon Polaritrons

Contact Info

Product

Resources

About